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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Branch, D.W. Olsson, R.H. |
| Copyright Year | 2014 |
| Description | Author affiliation: Adv. MEMS Dept., Sandia Nat. Labs., Albuquerque, NM, USA (Olsson, R.H.) || Biosensors & Nanomater. Dept., Sandia Nat. Labs., Albuquerque, NM, USA (Branch, D.W.) |
| Abstract | Eliminating spurious modes in Aluminum Nitride (AlN) microresonators improves their insertion loss and quality factor by reducing acoustic energy leakage. Spurious modes that result from transverse wave propagation, termed fine-frequency modes, leak energy and propagate in the electrical busing and appear near the fundamental resonance. Although these modes can be predicted using three-dimensional (3D) finite element methods (FEM) for devices with very short acoustic length (e.g. 1 acoustic wavelength), 3D FEM is very slow and memory intensive when compared to a two-dimensional (2D) simulation. A fast 2D coupling-of-modes (COM) model was developed to predict, identify and implement strategies to suppress the fine-frequency modes. |
| Starting Page | 572 |
| Ending Page | 577 |
| File Size | 1749547 |
| Page Count | 6 |
| File Format | |
| e-ISBN | 9781479970490 |
| DOI | 10.1109/ULTSYM.2014.0141 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-09-03 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Acoustics Transducers Finite element analysis Fingers Microcavities Three-dimensional displays III-V semiconductor materials Lamb Waves Aluminum nitride Spurious Modes FEM COM |
| Content Type | Text |
| Resource Type | Article |
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