NDLI: Finite element analysis of anchor loss in AlN Lamb wave resonators

Content Provider	IEEE Xplore Digital Library
Author	Yung-Yu Chen Yen-Ting Lai Chih-Ming Lin
Copyright Year	2014
Description	Author affiliation: Dept. of Mech. Eng., Tatung Univ., Taipei, Taiwan (Yung-Yu Chen; Yen-Ting Lai) \|\| Dept. of Mech. Eng., Univ. of California, Berkeley, Berkeley, CA, USA (Chih-Ming Lin)
Abstract	Acoustic energy leakage through support tethers into the substrate, known as anchor loss, decreases the quality factors (Q) of micromechanical aluminum nitride (AlN) Lamb wave resonators. In this work, we present a theoretical study on the anchor loss of the AlN Lamb wave resonators by using the perfect matched layer (PML) approach in the finite element analysis (FEA) simulation. The anchor loss Q's of the resonator with different anchor widths and lengths were theoretically calculated and compared. The tether geometries significantly affect the anchor loss Q when the interdigital transducer (IDT) widths are equal to 5.4 and 4.44 μm and less influence the anchor loss Q while the IDT width equals 2.77 μm. The results indicate that the anchor loss dominates the loss mechanism in the Lamb wave resonator at low frequencies and other damping sources decrease the Q at high frequencies. The PML-based FEA method is also utilized to compute the anchor loss Q's of the Lamb wave resonators utilizing the flat and convex free edges, showing good agreement with the experimental Q's in the literature.
Sponsorship	IEEE Ultrason., Ferroelectr., Freq. Control Soc.
Starting Page	1
Ending Page	5
File Size	353498
Page Count	5
File Format	PDF
ISBN	9781479949151
DOI	10.1109/FCS.2014.6859875
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-05-19
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	III-V semiconductor materials Loss measurement Resonant frequency Micromechanical devices Acoustic waves Q-factor Admittance convex free edge Lamb wave resonator aluminum nitride perfectly matched layer finite element analysis anchor loss tether loss quality factor
Content Type	Text
Resource Type	Article

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