NDLI: Roll to roll fabrication process of thin film silicon solar cells on steel foil

Content Provider	IEEE Xplore Digital Library
Author	Van Aken, B.B. Dorenkamper, M. Devilee, C. Heijna, M.C.R. Loffler, J. Soppe, W.J.
Copyright Year	2009
Description	Author affiliation: ECN Solar Energy, P.O. Box 1, 1755 ZG Petten, the Netherlands (Van Aken, B.B.; Dorenkamper, M.; Devilee, C.; Heijna, M.C.R.; Loffler, J.; Soppe, W.J.)
Abstract	ECN is developing a novel fabrication process for thin film silicon solar cells on steel foil. Key features in this process chain are: 1) application of an insulating barrier layer which enables texturization of the rear contact with submicron structures for light trapping; 2) Si deposition with remote, linear PECVD; 3) series interconnection by laser scribing and printing after deposition of the layers (reducing the total number of process steps). The barrier layer is primarily an enabler for monolithic series interconnection of cells, but we show that we can also fabricate any arbitrary sub-micron structure in this layer by hot embossing to achieve optimum light trapping in the solar cells. For deposition of doped and intrinsic silicon layers we use novel remote and linear plasma sources, which are excellently suited for continuous roll-to-roll processing. We have been able to fabricate device-quality amorphous and microcrystalline silicon layers with these sources. First pin a-Si solar cells have been made on FTO glass, yielding initial efficiencies up to 4.5%. First nip a-Si cells made on steel foil plus textured barrier layer yielded efficiencies of about 3.7%.
Starting Page	001381
Ending Page	001385
File Size	7727851
Page Count	5
File Format	PDF
ISBN	9781424429493
ISSN	01608371
DOI	10.1109/PVSC.2009.5411289
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Semiconductor thin films Silicon Photovoltaic cells Steel Optical device fabrication Insulation Printing Embossing Plasma sources Amorphous materials
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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