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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Shu, B. Das, U. Jani, O. Hegedus, S. Birkmire, R. |
| Copyright Year | 2009 |
| Description | Author affiliation: Institute of Energy Conversion, University of Delaware, Newark, 19716 USA (Shu, B.; Das, U.; Jani, O.; Hegedus, S.; Birkmire, R.) |
| Abstract | The interdigitated back contact silicon heterojunction (IBC-SHJ) solar cell requires a low temperature front surface passivation/anti-reflection structure. Conventional silicon surface passivation using SiO or a-SiN is performed at temperature higher than 400°C, which is not suitable for the IBC-SHJ cell. In this paper, we propose a PECVD a-Si:H/a-SiN:H/a-SiC:H stack structure to passivate the front surface of crystalline silicon at low temperature. The optical properties and passivation quality of this structure are characterized and solar cells using this structure are fabricated. With 2 nm a-Si:H layer, the stack structure exhibits stable passivation with effective minority carrier lifetime higher than 2 ms, and compatible with IBC-SHJ solar cell processing. A critical advantage of this structure is that the a-SiC:H allows it to be HF resistant, thus it can be deposited as the first step in the process. This protects the a-Si:H/c-Si interface and maintains a low surface recombination velocity. |
| Starting Page | 001316 |
| Ending Page | 001320 |
| File Size | 7727391 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424429493 |
| ISSN | 01608371 |
| DOI | 10.1109/PVSC.2009.5411256 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-06-07 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Temperature Passivation Silicon Heterojunctions Photovoltaic cells Optical films Stimulated emission Hafnium Coatings Absorption |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering |
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