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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kessels, W.M.M. Gielis, J.J.H. Hoex, B. Terlinden, N.M. Dingemans, G. Verlaan, V. van de Sanden, M.C.M. |
| Copyright Year | 2009 |
| Description | Author affiliation: Dept. of Applied Physics, Eindhoven Univ. of Technology, P.O. Box 513, 5600 MB, The Netherlands (Kessels, W.M.M.; Gielis, J.J.H.; Hoex, B.; Terlinden, N.M.; Dingemans, G.; Verlaan, V.; van de Sanden, M.C.M.) |
| Abstract | Recently, we have demonstrated that ultrathin (≪30 nm) films of Al synthesized by (plasma-assisted) atomic layer deposition (ALD) provide an excellent level of surface passivation of c-Si which may find important applications in (high-efficiency) solar cells. In this contribution, the Al passivation mechanism has been further elucidated by the contactless characterization of the c-Si/Al interface by optical second-harmonic generation (SHG). SHG has revealed effective field-effect passivation of the c-Si surface caused by a negative fixed charge density of $5×10^{12}$ $cm^{−2}$ in an annealed, 11 nm thick Al film while it is on the order of $10^{11}$ $cm^{™2}$ in the as-deposited film which shows negligible passivation. A comparison with SHG measurements on a 84 nm thick a-SiN:H film treated in a conventional firing furnace has revealed the presence of a positive fixed charge density of $2×10^{12}$ $cm^{−2}$ which further corroborates the SHG analysis and results. |
| Starting Page | 000427 |
| Ending Page | 000431 |
| File Size | 2673063 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424429493 |
| ISSN | 01608371 |
| DOI | 10.1109/PVSC.2009.5411651 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-06-07 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Passivation Atomic layer deposition Plasma applications Photovoltaic cells Optical films Optical harmonic generation Character generation Solar power generation Annealing Density measurement |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering |
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