NDLI: Cross-contamination reduction by beam cleaning

Content Provider	IEEE Xplore Digital Library
Author	Morita, T. Kabasawa, M. Sugitani, M.
Copyright Year	2000
Description	Author affiliation: Sumitomo Eaton Nova Corp., Ehime, Japan (Morita, T.)
Abstract	Beam cleaning by Ar/sup +/, Xe/sup +/, F/sup +/ and SiF/sub 3//sup +/ implants was studied for arsenic cross-contamination reduction. After As/sup +/ implantation at 40 keV with a dose of 1/spl times/10/sup 17/ ions/cm/sup 2/, cross-contamination was measured by TXRF using Ar/sup +/ implants at 40 keV with a dose of 5/spl times/10/sup 15/ ions/cm/sup 2/, to check each cleaning procedure. The concentration of the initial As cross-contamination after As/sup +/ implantation increased to about 1/spl times/10/sup 13/ atoms/cm/sup 2/. The contamination level went down to about 1/10th when using Ar/sup +/ cleaning implants with a dose of 8/spl times/10/sup 17/ ions/cm/sup 2/. For the Xe/sup +/ cleaning implant, a stronger sputtering effect had been expected for its larger mass, but the contamination reduction was a little less than that of the Ar/sup +/ cleaning implant because of less beam current. Regarding F/sup +/ and SiF/sub 3//sup +/ cleaning implants, the reduction is at a higher rate than for the Ar/sup +/ case at the same cleaning dose. However, the elapsed time of the cleaning implant was almost the same as that of the Ar/sup +/ cleaning implant, but used less beam current. Therefore, for effectiveness and ease of use, an Ar/sup +/ cleaning implant with as high current as possible is recommended for beam cleaning.
Starting Page	703
Ending Page	706
File Size	320302
Page Count	4
File Format	PDF
ISBN	0780364627
DOI	10.1109/IIT.2000.924250
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-09-17
Publisher Place	Austria
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Cleaning Implants Sputtering Argon Pollution measurement Atomic measurements Surface contamination Chemicals Power engineering and energy Production
Content Type	Text
Resource Type	Article

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