NDLI: Modifications to improve lifetime of the ELS ion source

Content Provider	IEEE Xplore Digital Library
Author	Rathmeli, R.D. Hsieh, T.J. Trueira, F.R.
Copyright Year	2000
Description	Author affiliation: Axcelis Technol. Inc., Beverly, MA, USA (Rathmeli, R.D.)
Abstract	The Extended Life Source, ELS, generally provides improved source life compared to the more commonly used Bernas source. The ELS source uses an indirectly heated cathode to keep the filament out of the arc chamber. Typical lifetime for NV-GSD sources running a mix of species in production has been about 100 to 300 hrs. Failure has often been associated with the cathode insulation, filament failures, or filament shorts. A new cathode assembly is discussed, which has allowed the source life to exceed 1300 hrs in production use on a NV-GSD/HE. Multiple-charged species are more challenging to produce and require high arc power to achieve useable currents. Requirements for 100 /spl mu/A of He/sup ++/ with a source life of at Least 100 hrs on the Axcelis 8250 implanter necessitated a factor of two increase in source life. A special ELS source was developed which uses a thicker cathode, tungsten repeller, and other modifications to tolerate high arc power to enhance He/sup ++/ current. These modifications and their effect on performance is described.
Starting Page	524
Ending Page	526
File Size	248719
Page Count	3
File Format	PDF
ISBN	0780364627
DOI	10.1109/IIT.2000.924204
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-09-17
Publisher Place	Austria
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ion sources Cathodes Assembly Stress Production Helium Coatings Gas insulation Tungsten Wire
Content Type	Text
Resource Type	Article

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