NDLI: Analyzing the impact of process variations on parametric measurements: Novel models and applications

Content Provider	IEEE Xplore Digital Library
Author	Reda, S. Nassif, S.R.
Copyright Year	2009
Description	Author affiliation: Division of Engineering, Brown University, Providence, RI 02912, USA (Reda, S.) \|\| Austin Research Laboratory, IBM Corporation, TX 78758, USA (Nassif, S.R.)
Abstract	In this paper we propose a novel statistical framework to model the impact of process variations on semiconductor circuits through the use of process sensitive test structures. Based on multivariate statistical assumptions, we propose the use of the expectation-maximization algorithm to estimate any missing test measurements and to calculate accurately the statistical parameters of the underlying multivariate distribution. We also propose novel techniques to validate our statistical assumptions and to identify any outliers in the measurements. Using the proposed model, we analyze the impact of the systematic and random sources of process variations to reveal their spatial structures. We utilize the proposed model to develop a novel application that significantly reduces the volume, time, and costs of the parametric test measurements procedure without compromising its accuracy. We extensively verify our models and results on measurements collected from more than 300 wafers and over 25 thousand die fabricated at a state-of-the-art facility. We prove the accuracy of our proposed statistical model and demonstrate its applicability towards reducing the volume and time of parametric test measurements by about 2:5 – 6:1× at absolutely no impact to test quality.
Starting Page	375
Ending Page	380
File Size	1672418
Page Count	6
File Format	PDF
ISBN	9781424437818
ISSN	15301591
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-04-20
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	European Design Automation Association (EDAA)
Subject Keyword	Semiconductor device modeling Volume measurement Time measurement Circuit testing Costs Process design Manufacturing processes Laboratories Semiconductor device testing Expectation-maximization algorithms
Content Type	Text
Resource Type	Article

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