NDLI: Metal-Metal Oxide Sandwich: A New Gas Sensitive Structure for Smart Sensors

Content Provider	IEEE Xplore Digital Library
Author	Galdikas, A. Mironas, A. Senuliene, D. Setkus, A.
Copyright Year	1995
Description	Author affiliation: Semiconductor Sensors Laboratory, Semiconductor Physics Institute, A. Gostauto 11, LT-2600 Vilnius, Lithuania; Fax: (370 2) 627123; Tel.: (370 2) 619759; E-mail: SETKUS@UJ.PFI.LT (Setkus, A.) \|\| Semiconductor Sensors Laboratory, Semiconductor Physics Institute, A. Gostauto 11, LT-2600 Vilnius, Lithuania; Fax: (370 2) 627123; Tel.: (370 2) 619759 (Galdikas, A.; Mironas, A.; Senuliene, D.)
Abstract	In our report we are discussing the novel sandwich structure based on semiconducting metal oxide top-layer and thin metal bottom-films. The model structure consists of several thin films: the metallic Pt-film covered by ultrathin Ni and the semiconducting cap of the structure produced by deposition of the SnO-film. The resistance of the sandwich is nearly equal to the resistance of the bottom layer at the room temperature in the clean air. The temperature dependence of the resistance of the sandwich is unique when compared with the well known resistive gas sensors. The resistance of the sandwich is selective to NO gas. The sandwich without the Ni inter-layer is insensitive to NO. We think that the effects obtained are related to (1) the field effect controlled electron transport through the narrowest parts of the bottom-layer, (2) the dependence of the interface potential on the density of the extra surface charge induced by gas chemosorption on the top-film and (3) the influence of the work function of the metal on both the Fermi energy position in the band gap of the SnO-film and the chemosorption of gas species on the surface of the top-film.
Starting Page	727
Ending Page	730
File Size	311634
Page Count	4
File Format	PDF
ISBN	286332182X
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-09-25
Publisher Place	The Netherlands
Access Restriction	Subscribed
Rights Holder	Editions Frontieres
Subject Keyword	Intelligent sensors Semiconductivity Sandwich structures Semiconductor thin films Sputtering Temperature sensors Temperature dependence Gas detectors Electrons Photonic band gap
Content Type	Text
Resource Type	Article

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