NDLI: Coupling of Waveguides and Photodetectors for Microsystem Applications

Content Provider	IEEE Xplore Digital Library
Author	Hillergmann, U. Goser, K.
Copyright Year	1995
Description	Author affiliation: University of Dortmund, Faculty of Electrical Engineering, LS Bauelemente der Elektrotechnik, D 44221 Dortmund, Germany. (Goser, K.) \|\| University of Dortmund, Faculty of Electrical Engineering, LS Bauelemente der Elektrotechnik, D 44221 Dortmund, Germany. e-mail: ulih@luzi.e-technik.uni-dortmund.de (Hillergmann, U.)
Abstract	Optical waveguides and microelectronic circuits have been integrated monolithically on one silicon chip. The integration process is based on a 0.8 ¿m SWAMI-LOCOS CMOS-process. The optoelectronic interfaces are fabricated in three different techniques: waveguides are coupled to integrated photodiodes by leaky wave coupling, butt coupling or mirror coupling. Leaky wave coupling results in a non-reproduceable coupling due to insufficient wafer surface planarity after thermal field oxidation. Coupling efficiency depends on the oxide layer thickness between the light guiding SiON-film and the active detector area. Butt coupling causes high photocurrents, but it leads to an increased leakage current in the MOS-transistors caused by parasitic channels. Only coupling by mirrors has the advantage of high efficient signal coupling from the waveguide to the photodetector in a MOS compatible technology. The coupling efficiency is defined by the depth of the mirror, which is etched into the waveguide. Because of the modular integration technique MOS processing is not affected by the waveguide deposition process and the mirror etch. This paper rates the efficiencies of the diferent coupling techniques. The reproduceabilities of the fabrication processes are discussed.
Starting Page	285
Ending Page	288
File Size	1062722
Page Count	4
File Format	PDF
ISBN	286332182X
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-09-25
Publisher Place	The Netherlands
Access Restriction	Subscribed
Rights Holder	Editions Frontieres
Subject Keyword	Photodetectors Optical waveguides Coupling circuits Mirrors Etching Integrated optics Microelectronics Silicon Photodiodes Surface waves
Content Type	Text
Resource Type	Article

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