NDLI: All-Silicon Thermo-Optic Micro-Modulator

Content Provider	IEEE Xplore Digital Library
Author	Cocorullo, G. Iodice, M. Rendina, I. Sarro, P. M.
Copyright Year	1995
Description	Author affiliation: Istituto di Ricerca per l'Elettromagnetismo e i Componenti Elettronici, Consiglio, Nazionale delle Ricerche, Via Diocleziano 328, 80124 Napoli, Italy; Dipartimento di Ingegneria Elettronica, Informatica e Sistemistica, Università della Calabria, 87036 Rende (CS), Italy, tel. +39-81-5707999, +39-984-494704, fax 5705734, 494713 (Cocorullo, G.) \|\| Istituto di Ricerca per l'Elettromagnetismo e i Componenti Elettronici, Consiglio, Nazionale delle Ricerche, Via Diocleziano 328, 80124 Napoli, Italy, tel. +39-81-5707999, fax 5705734, E-mail: rendina@irecel.irece.na.cnr.it (Rendina, I.) \|\| Istituto di Ricerca per l'Elettromagnetismo e i Componenti Elettronici, Consiglio, Nazionale delle Ricerche, Via Diocleziano 328, 80124 Napoli, Italy; Dipartimento di Ingegneria Elettronica, Universitá degli Studi di Napoli, ``Federico II'', via Claudio 21, 80125 Napoli, Italy. tel. +39-81-5707999, +39-81-7683128, fax 5705734 (Iodice, M.) \|\| DIMES, TU Delft, P.O. Box 5053, 2600 GB Delft, The Netherlands, tel. +31-15-787708, fax 622163, E-mail: sarro@dimes.tudelft.nl (Sarro, P. M.)
Abstract	A silicon 50-¿m-long Fabry-Perot waveguide modulator, based on the thermo-optic effect and electrically driven, has been entirely fabricated using microelectronic techmiques. The device is thought for direct integration with electronic circuits because the planar optical cavity has been defined by plasma etching and not by cleaveage of the chip. Operation at frequencies up to about 2 MHz has been demonstrated at the wavelength of 1.55 ¿m. This is by far the best result ever reported, to our knowledge, for termo-optic effect based modulators. The device could match the features requested for several low-cost low-performance fiber optic applications.
Starting Page	651
Ending Page	654
File Size	422561
Page Count	4
File Format	PDF
ISBN	286332182X
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-09-25
Publisher Place	The Netherlands
Access Restriction	Subscribed
Rights Holder	Editions Frontieres
Subject Keyword	Optical waveguides Silicon Fabry-Perot Thermooptic effects Microelectronics Electronic circuits Integrated optics Optical devices Optical modulation Plasma applications
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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