NDLI: A Surface Micromachined Piezoresistive Pressure Sensor with High Sensitivity

Content Provider	IEEE Xplore Digital Library
Author	Lisec, T. Kreutzer, M. Wagner, B.
Copyright Year	1995
Description	Author affiliation: Fraunhofer-Institut für Siliziumtechnologie, Dillenburger Str. 53, D-14199 Berlin, Germany (Lisec, T.; Kreutzer, M.; Wagner, B.)
Abstract	This paper presents a surface micromachined piezoresistive absolute pressure sensor with improved performance. A sensitivity of about 11 mV/V/bar in the range 0-500 mbar overpressure has been achieved. The sensor contains four polysilicon piezoresistors arranged in a Wheatstone bridge at the underside of a polysilicon membrane to reduce invironmental influences (e.g. light, moisture). Position and size of the piezoresistors has been optimised by FEA calculations. Three layers of polysilicon deposited by standard CVD techniques are used for membrane, piezoresistors and sacrificial layer of the sensor. Using polysilicon as membrane material thermal stresses generated in the sensor structure could be minimised. With an epitaxial deposition technology in-situ doped membranes with thicknesses significantly higher then 2 ¿m and controlled intrinsic stress could be fabricated. The sacrificial polysilicon was etched with an standard aqueous TMAH solution. Suggested by technological experience and experimental results in a second step a combined sacrificial layer etching technique has been applied. The obtained flat sensor structure provides decidive advantages for fabrication.
Starting Page	339
Ending Page	342
File Size	2581406
Page Count	4
File Format	PDF
ISBN	286332182X
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-09-25
Publisher Place	The Netherlands
Access Restriction	Subscribed
Rights Holder	Editions Frontieres
Subject Keyword	Piezoresistance Biomembranes Piezoresistive devices Thermal stresses Etching Bridge circuits Moisture Thermal sensors Stress control Thickness control
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in