NDLI: 2-D model of the indirectly-heated type microwave power sensor based on GaAs MMIC process

Content Provider	IEEE Xplore Digital Library
Author	Zhenxiang Yi Xiaoping Liao Hao Wu
Copyright Year	2013
Description	Author affiliation: Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China (Zhenxiang Yi; Xiaoping Liao; Hao Wu)
Abstract	In this paper, a novel two-dimensional (2-D) model is established to describe the temperature distribution of the indirectly-heated type microwave power sensor. Fourier series is applied to obtain the solution of the heat transfer equation based on the boundary conditions. Finite-element method (FEM) analysis is performed to verify the 2-D model and the simulation shows that the 2-D model is more accurate than the existing 1-D model. The power sensor is fabricated by GaAs MMIC process and MEMS technology. Au is chosen for the transmission line and the measuring pad, TaN is fabricated to form the two loaded resistors. Power measurement is accomplished from 0-100mW under 0.1GHz, 0.5GHz, 1GHz, 5GHz and 10GHz, and the sensitivities are 0.26mV/mW, 0.25mV/mW, 0.23mV/mW, 0.19mV/mW and 0.16mV/mW, respectively. The measured results demonstrate that the 2-D model agrees with the measurement well at low frequency. However, errors increase at high frequency because of electromagnetic coupling loss of the transmission line and the parasitic loss of the load resistors.
Starting Page	1
Ending Page	4
File Size	2057479
Page Count	4
File Format	PDF
ISBN	9781467346429
ISSN	19300395
DOI	10.1109/ICSENS.2013.6688404
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-11-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Mathematical model Load modeling Electromagnetic heating Transmission line measurements Resistors Finite element analysis Microwave circuits
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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