NDLI: A piezoresistive pressure sensor with improved sensitivity in low pressure condition

Content Provider	IEEE Xplore Digital Library
Author	Hui-Yang Yu Ming Qin Jian-Qiu Huang
Copyright Year	2013
Description	Author affiliation: Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China (Hui-Yang Yu; Ming Qin; Jian-Qiu Huang)
Abstract	In this paper, a high sensitive piezoresistive pressure sensor is designed, fabricated and characterized. The designed structure is composed of 4 diagrams separated by two crossed thick beams. There are two piezoresistors located at two ends of the beam, which are used to measure the largest stress in the structure during stressed. Four piezoresistors are connected into a Wheatstone Bridge. The crossed thick beams are covered with a 2μm thick Al layer resulting more residual stress on piezoresistors. This structure has shown improved sensor sensitivity in low pressure condition. The sensor is characterized under the pressure ranges from 5-400hPa. As a reference, a conventional flat membrane pressure sensor is also fabricated. The testing results show that the sensitivity of crossed beam structure is 32.9μV/hPa, which is 3.8 times higher than that of the conventional structure. Finally, the stress simulation results of the crossed beam membrane (CBM) and the conventional flat membrane (CFM) are given to verify the testing results.
Starting Page	1
Ending Page	4
File Size	1242281
Page Count	4
File Format	PDF
ISBN	9781467346429
ISSN	19300395
DOI	10.1109/ICSENS.2013.6688390
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-11-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Stress Silicon Piezoresistance Sensitivity Piezoresistive devices Testing Fabrication
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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