NDLI: Fully integrated System-On Chip gas sensor in CMOS technology

Content Provider	IEEE Xplore Digital Library
Author	Gamauf, C. Siegele, M. Nemecek, A. Mutinati, G.C. Steinhauer, S. Brunet, E. Kock, A. Kraft, J. Siegert, J. Schrank, F.
Copyright Year	2013
Description	Author affiliation: ams AG, Unterpremstätten, Austria (Kraft, J.; Siegert, J.; Schrank, F.) \|\| Dept. of Micro- & Nanosyst., Univ. of Appl. Sci. Wiener Neustadt, Wiener Neustadt, Austria (Gamauf, C.; Siegele, M.; Nemecek, A.) \|\| Dept. of Health & Environ., Austrian Inst. of Technol. GmbH, Vienna, Austria (Mutinati, G.C.; Steinhauer, S.; Brunet, E.; Kock, A.)
Abstract	Within this work the development of an integrated gas sensor as System-On Chip (SOC) in a 0.35μm standard CMOS process plus CMOS compatible $SnO_{2}-deposition$ and Si-release steps is presented. The $SnO_{2}$ layer provides high gas sensitivity to 10ppm for CO in humid air. An optimized Micro-Hotplate (μHP) consisting of a fully released membrane with a poly-Si heater in the oxide stack is designed. Due to the small area of $A_{μHP}=100×100μm^{2}$ and the switched capacitor temperature controller, low power consumption $P_{el}=24mW$ at high temperatures T=400°C and short rise time of $i_{nîe}=11.8ms$ are achieved. The differential setup contains sense and dummy sensors in order to compensate drift and tolerances. The readout stage consists of a gain adjustable amplifier with digital offset compensation and shows a relative error e<;±1%. The complete multichannel chip carries six sensors at a size $A_{chip}=3.4×2.4mm^{2},$ a power consumption $P_{chip}=180mW$ and is well suited for various low power gas sensing applications.
Starting Page	1
Ending Page	4
File Size	1173233
Page Count	4
File Format	PDF
ISBN	9781467346429
ISSN	19300395
DOI	10.1109/ICSENS.2013.6688155
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-11-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gas detectors Temperature sensors Temperature measurement CMOS integrated circuits Temperature control Power demand
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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