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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zhenxiang Yi Xiaoping Liao |
| Copyright Year | 2014 |
| Description | Author affiliation: Key Lab. of MEMS, Southeast Univ., Nanjing, China (Zhenxiang Yi; Xiaoping Liao) |
| Abstract | In this paper, a novel integrated sensor for microwave power and frequency measurement is proposed for 1-10GHz application. In this device, the incident power is dissipated to heat by loaded resistors, and then detected indirectly by output voltage based on Seebeck effect. A MEMS coupler is designed over the CPW transmission line and the coupled power varies with the frequency of the signal. Therefore, by measuring the coupled power, the frequency of the signal can be deduced. This integrated power and frequency sensor is fabricated by GaAs MMIC process and MEMS technology. The measured return loss is -26dB at 1GHz and -22dB at 10GHz. The power measurement indicates that the sensitivity is close to 0.116mV/mW at 1GHz and 0.110mV/mW at 10GHz. The frequency measurement is performed and the sensitivity is close to 0.035mV/GHz under the incident power of 60mW. |
| Starting Page | 408 |
| Ending Page | 411 |
| File Size | 1836532 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479901623 |
| DOI | 10.1109/ICSENS.2014.6985021 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-11-02 |
| Publisher Place | Spain |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Microwave measurement Microwave circuits Micromechanical devices Frequency measurement Transmission line measurements Microwave communication GaAs MMIC microwave power microwave frequency integrated sensor MEMS |
| Content Type | Text |
| Resource Type | Article |
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