NDLI: The multipole resonance probe: Evolution of a plasma sensor

Content Provider	IEEE Xplore Digital Library
Author	Schulz, C. Rolfes, I. Styrnoll, T. Awakowicz, P. Oberrath, J. Mussenbrock, T. Brinkmann, R.P. Storch, R. Musch, T.
Copyright Year	2013
Description	Author affiliation: Inst. of Electron. Circuits, Ruhr-Univ. Bochum, Bochum, Germany (Storch, R.; Musch, T.) \|\| Inst. for Electr. Eng. & Plasma Technol., Ruhr-Univ. Bochum, Bochum, Germany (Styrnoll, T.; Awakowicz, P.) \|\| Inst. for Theor. Electr. Eng., Ruhr-Univ. Bochum, Bochum, Germany (Oberrath, J.; Mussenbrock, T.; Brinkmann, R.P.) \|\| Inst. of Microwave Syst., Ruhr-Univ. Bochum, Bochum, Germany (Schulz, C.; Rolfes, I.)
Abstract	A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system ”probe-plasma”, a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately $n_{e}$ = $10^{16}$ $m^{-3}...$ $10^{17}$ $m^{-3},$ which is sufficient for the considered process.
Starting Page	1
Ending Page	4
File Size	967591
Page Count	4
File Format	PDF
ISBN	9781467346429
ISSN	19300395
DOI	10.1109/ICSENS.2013.6688324
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-11-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasmas Probes Frequency measurement Materials requirements planning Plasma measurements Resonant frequency Dielectrics
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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