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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kunii, Toshie Murata, Kazuya Matsumoto, Mitsuhiro Kawamoto, Kunihiro Kobayashi, Yasutaka Aya, Youichirou Nakagawa, Makoto Terakawa, Akira Tanaka, Makoto |
| Copyright Year | 2008 |
| Description | Author affiliation: Advanced Energy Research Center, SANYO Electric Co., Ltd., 7-3-2, Ibukidai-Higashi, Kobe, 651-2242 Hyogo, JAPAN (Kunii, Toshie; Murata, Kazuya; Matsumoto, Mitsuhiro; Kawamoto, Kunihiro; Kobayashi, Yasutaka; Aya, Youichirou; Nakagawa, Makoto; Terakawa, Akira; Tanaka, Makoto) |
| Abstract | A very high deposition rate for high-quality microcrystalline silicon (μc-Si) films has been achieved under very high-pressure conditions (≫ 1,000 Pa) using a Localized Plasma Confinement (LPC)-CVD method which has a special cathode. The uniformity of the μc-Si film thickness was 2.4% on a 55×65 $cm^{2}$ glass substrate with a deposition rate of 2.7 nm/s. We also achieved maximum conversion efficiency of 11.4% for an a-Si/μc-Si tandem solar cell (1 $cm^{2})$ on a 20×20 $cm^{2}$ glass substrate and average conversion efficiency of 9.84% for a-Si/μc-Si tandem solar cells (1 $cm^{2})$ on a 55×65 $cm^{2}$ glass substrate with a deposition rate (Rd) of 1.8 nm/s. These results indicate that LPC-CVD method is a good candidate as an effective production technology for large-area, high-performance μc-Si thin-film solar cells. |
| Starting Page | 1 |
| Ending Page | 5 |
| File Size | 8507400 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424416400 |
| ISSN | 01608371 |
| DOI | 10.1109/PVSC.2008.4922609 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-05-11 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Production Silicon Photovoltaic cells Plasma confinement Linear predictive coding Glass Substrates Semiconductor films Cathodes Transistors |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering |
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