NDLI: Effect of chemical annealing on the optical properties of hydrogenated amorphous silicon films

Content Provider	IEEE Xplore Digital Library
Author	El-Naggar, A. M. Al-Dhafiri, A. M.
Copyright Year	2008
Description	Author affiliation: Physics and astronomy department, Faculty of Science, King Saud University, P. O. Box 2455, Riyadh 11451, Saudi Arabia (El-Naggar, A. M.; Al-Dhafiri, A. M.)
Abstract	The influence of atomic hydrogen in chemical annealing of a-Si:H films on its optical parameters was studied using spectrophotometric measurements of the film transmittance and reflectance in the wavelength range 200 – 3000 nm. In this chemical annealing, the deposition of a thin layer and treatment with atomic hydrogen were repeated alternately, where both the thickness of the thin cyclic layer, d, and the treatment time for each cycle, t, were kept fixed for each sample. A series of different samples with average thickness of 0.5 μm were prepared with different d and t. It was found that the refractive index, n, and the optical energy gap, E, increase as the treatment time,t, increases from 0 to 60 seconds, while at t = 90 second both n & E decrease. Also, both the refractive index and the optical energy gap decrease with increasing the relative diffusion length of hydrogen, √t from 0.39 to 0.77. The widening of E is due to the structural relaxation resulting from impingement of atomic hydrogen on the growing surface. So, a good quality a-Si:H with the optical energy gap of 1.78 eV exhibiting high stability against light soaking was successfully prepared.
Starting Page	1
Ending Page	4
File Size	4097929
Page Count	4
File Format	PDF
ISBN	9781424416400
ISSN	01608371
DOI	10.1109/PVSC.2008.4922559
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-05-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical films Chemicals Annealing Amorphous silicon Semiconductor films Atom optics Optical refraction Optical variables control Hydrogen Atomic measurements
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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