NDLI: Evaluation and optimization of die-shift in Embedded Wafer-Level Packaging by enhancing the adhesion strength of silicon chips to carrier wafer

Content Provider	IEEE Xplore Digital Library
Author	Mazuir, J. Olmeta, V. Yin, M. Pares, G. Planchais, A. Inal, K. Saadaoui, M.
Copyright Year	2011
Description	Author affiliation: STMicroelectronics, 190 Avenue Célestin Coq, 13120 Rousset, France (Planchais, A.) \|\| Ecole Nationale Supérieure des Mines de Saint-Étienne (ENSM-SE), Centre of microelectronics Provence, 880, Avenue de Mimet. 13541 Gardanne, France (Mazuir, J.; Olmeta, V.; Yin, M.; Inal, K.; Saadaoui, M.) \|\| CEA-Leti, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France (Pares, G.)
Abstract	In this paper, we focus on a method to evaluate and to optimize the die shift that occurs during epoxy molding for embedded wafer level technology (eWLB), basically by adjusting the adhesion level of silicon dies on top of the temporary carrier support. Here, a stress-free 70µm thick silicon dies were prepared using dicing before grinding process (DBG). Then a total of 495 dies were placed on a 8inch silicon carrier wafer that it was preliminary coated with two different adhesive layers made by pressure sensitive laminate and by a thermoplastic like spin-coated films. A 5µm thick copper marks have been manufactured by through resist electroplating process on the carrier wafer prior to the adhesive coating, and on each dies prior to the DBG process. Those copper marks were then used to evaluate the die shift after epoxy molding using X-ray microscopy and image processing software. The adhesion strength of silicon dies were studied through die shear measurement, and the pick and place process parameters were subsequently adjusted to obtain the utmost adhesion level. An optimal die shift of 30µm ± 15µm has been achieved after epoxy molding process for an optimal applied pressure and an optimal temperature-pressure parameters for pressure sensitive and thermoplastic layers, respectively.
Starting Page	747
Ending Page	751
File Size	1739928
Page Count	5
File Format	PDF
ISBN	9781457719837
e-ISBN	9781457719820
e-ISBN	9781457719813
DOI	10.1109/EPTC.2011.6184519
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-12-07
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Adhesives Force Films Copper Electronics packaging
Content Type	Text
Resource Type	Article

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