NDLI: Pt-Ni / Pt-Zr electrodes for stable SAW resonator operation during repeated temperature cycling up to 1000°C

Content Provider	IEEE Xplore Digital Library
Author	Pereira da Cunha, M. Maskay, A. Lad, R.J. Frankel, D.J. Moulzolf, S. Call, M. Bernhardt, G.
Copyright Year	2015
Description	Author affiliation: Lab. of Surface Sci. & Technol., Orono, ME, USA (Pereira da Cunha, M.; Maskay, A.; Lad, R.J.; Frankel, D.J.; Moulzolf, S.; Call, M.; Bernhardt, G.)
Abstract	This paper reports on novel Pt-Ni / Pt-Zr alloy thin film electrodes for use in high-temperature harsh-environment surface acoustic wave (SAW) devices and sensors. Together with other protective thin film layers, which include capping, adhesion, and interfacial layered structures, the Pt-Ni / Pt-Zr film configuration allowed stable SAW device operation for over 300 hours of thermal cycling and soaking profiles up to 1000°C, and for short terms (12 hours) up to 1100°C. Data reported and discussed in this paper include SAW device impedance measurements obtained after heating up to 1100°C, and sensor frequency response after heating for over 300 hours of measured thermal cycle data between 300°C and 1000°C. The results confirm SAW device stability up to 1000°C for high-temperature harsh-environment sensor and frequency control applications.
Starting Page	1
Ending Page	4
File Size	668494
Page Count	4
File Format	PDF
e-ISBN	9781479981823
DOI	10.1109/ULTSYM.2015.0028
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-10-21
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature sensors Temperature measurement Electrodes Surface acoustic waves Films Surface acoustic wave devices temperature sensor high temperature thin film electrode Pt alloys harsh environment acoustic wave sensor
Content Type	Text
Resource Type	Article

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