NDLI: High temperature sensing technology for applications up to 1000°C

Content Provider	IEEE Xplore Digital Library
Author	da Cunha, M.P. Moonlight, T. Lad, R. Frankel, D. Bernhard, G.
Copyright Year	2008
Description	Author affiliation: Lab. for Surface Sci. & Technol., Univ. of Maine, Orono, ME (da Cunha, M.P.; Moonlight, T.; Lad, R.; Frankel, D.; Bernhard, G.)
Abstract	This work reports on the research and development of high temperature (HT) thin electrodes for use in acoustic wave sensor platforms up to 1000degC. Previously developed thin film platinum (Pt) electrodes limits HT operation due to a de-wetting phenomena, which results in loss of Pt film electrical continuity and device failure above 650mnplus750degC. To address the problem, co-deposition of Pt/rhodium (Pt-Rh) alloys with zirconia $(ZrO_{2})$ was used to fabricate HT-stable thin film surface acoustic wave interdigitated electrodes on langasite substrates. The resulting devices showed stable operation for over five months at 800degC. As temperature sensors, these devices have a sensitivity of 9.1 KHz/degC @800degC. In addition, ceramic silicon-alumina-nitrogen (SiAlON) overlayers were investigated to protect the sensor surface. The resulting devices enable harsh environment temperature and pressure sensors, for applications such as monitoring of jet engines, atmospheric re-entrance, and space exploration.
Starting Page	752
Ending Page	755
File Size	352708
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716550
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature sensors Electrodes Acoustic waves Acoustic sensors Surface acoustic wave devices Research and development Sensor phenomena and characterization Thin film devices Platinum alloys Transistors
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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