NDLI: Capacitively coupled IDT for high temperature SAW devices

Content Provider	IEEE Xplore Digital Library
Author	Moulzolf, S.C. Behanan, R. Pollard, T. Lad, R.J. da Cunha, M.P.
Copyright Year	2013
Description	Author affiliation: Lab. of Surface Sci. & Technol. (LASST), Univ. of Maine, Orono, ME, USA (Moulzolf, S.C.; Behanan, R.; Lad, R.J.; da Cunha, M.P.) \|\| Environetix Technol. Corp., Orono, ME, USA (Pollard, T.)
Abstract	Harsh environment surface acoustic wave (SAW) sensors are being researched and developed jointly by the University of Maine (UMaine) and Environetix Technologies Corp. for wireless and wired sensor applications, such as those found in gas turbines and power plant combustors. One goal of this work is to extend the operational temperature range of SAW sensors above 1000°C, potentially up to near the melting point of piezoelectric langasite crystals at 1400°C. To achieve stable performance at 1000°C and above, UMaine has developed nanocomposite thin film electrode materials, such as $PtRh/HfO_{2},$ and protecting capping layers, such as SiAlON and $Al_{2}O_{3}.$ However, these protective top layers, which aid in extending the life of the electrodes, are electrical insulators that prevent direct bonding to the electrodes. The UMaine team also found evidence of accelerated thin-film degradation close to the SAW interdigital transducer (IDT) bond pad welds at these extreme temperatures. This paper introduces a high temperature capacitive approach to electrically couple to the IDT, thus allowing electrical access to the SAW device. The capacitive coupling approach also avoids premature failure of the nanocomposite film caused by interdiffusion between the bond wires and the SAW IDT bond pads. The technique has been successfully implemented and SAW device operation at 1000°C has been achieved.
Sponsorship	IEEE Ultrason., Ferroelectr., Freq. Control Society
Starting Page	255
Ending Page	258
File Size	679564
Page Count	4
File Format	PDF
ISSN	19485719
e-ISBN	9781467356862
DOI	10.1109/ULTSYM.2013.0066
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-07-21
Publisher Place	Czech Republic
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Surface acoustic waves Temperature sensors Surface acoustic wave devices Films Wires interconnect harsh environment high temperature capacitive coupling SAW sensor wireless
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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