NDLI: Investigation of langasite surface acoustic wave pressure sensors with a structure of reinforcing its pressure sensitivity

Content Provider	IEEE Xplore Digital Library
Author	Honglang Li Yabing Ke Yiyu Zhao Lina Cheng Shitang He
Copyright Year	2015
Description	Author affiliation: Inst. of Acoust., Beijing, China (Honglang Li; Yabing Ke; Yiyu Zhao; Lina Cheng; Shitang He)
Abstract	Langasite (LGS) surface acoustic wave (SAW) pressure sensor utilizing a structure of reinforcing the pressure sensitivity was analyzed in theory and experiments. The structure made pressure force applied to the substrate at one point to enlarge the deformation. Theoretical analysis combined the finite element method and the perturbation theory was adopted to analyze its pressure sensitivity. Experiments of SAW pressure sensor utilizing the reinforced structure based on Z-cut LGS cuts with propagation angles of 80° were done. The theoretical and experimental pressure sensitivity were about 0.046MHz/MPa and 0.040MHz/MPa respectively. Experimental results agree well with theoretical results, which demonstrate the accuracy of theoretical analysis of the reinforced LGS SAW pressure sensors.
Starting Page	1
Ending Page	3
File Size	592707
Page Count	3
File Format	PDF
e-ISBN	9781479981823
DOI	10.1109/ULTSYM.2015.0353
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-10-21
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface acoustic waves Sensitivity Substrates Finite element analysis Resonant frequency Pressure sensors the perturbation thoery surface acoustic wave pressure sensor langasite finite element method
Content Type	Text
Resource Type	Article

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