NDLI: Temperature-insensitive silicon carbide resonant micro-extensometers

Content Provider	IEEE Xplore Digital Library
Author	Azevedo, R.G. Myers, D.R. Pisano, A.P.
Copyright Year	2009
Description	Author affiliation: Department of Mechanical Engineering, University of California, Berkeley, USA (Azevedo, R.G.; Myers, D.R.; Pisano, A.P.)
Abstract	This work presents thin-film polycrystalline silicon carbide resonant micro-extensometers fabricated on a single-crystalline silicon substrate that are temperature-insensitive near room temperature. The slight difference in thermal expansion coefficient between the device layer and the substrate induces a slight tensile strain near room temperature, which counteracts material softening of the resonator. An analytical model that accounts for these thermal effects predicts that this system will exhibit a turnover temperature near room temperature. A temperature sensitivity of 0.7 Hz/°C (3.6 ppm/°C) from 17 to 65 °C is measured experimentally, without compromising the strain-sensing capability of the resonator. This is nearly a 10-fold improvement over an equivalent epitaxial silicon resonant miro-extensometer (−30 ppm/°C) [1].
Starting Page	268
Ending Page	271
File Size	422827
Page Count	4
File Format	PDF
ISBN	9781424441907
e-ISBN	9781424441938
DOI	10.1109/SENSOR.2009.5285513
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon carbide Resonance Temperature sensors Substrates Capacitive sensors Frequency Thermal expansion Semiconductor thin films Softening Analytical models temperature compensation strain gauge gage resonator resonant silicon carbide SiC
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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