NDLI: Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Content Provider	IEEE Xplore Digital Library
Author	Mol, L. Rocha, L.A. Cretu, E. Wolffenbuttel, R.F.
Copyright Year	2009
Description	Author affiliation: Delft University of Technology, Fac. EEMCS, THE NETHERLANDS (Mol, L.; Wolffenbuttel, R.F.) \|\| University of Minho, Dept. of Industrial Electronics, Guimarães, PORTUGAL (Rocha, L.A.) \|\| U. of British Columbia, Dept. Electrical and Computer Eng., Vancouver, CANADA (Cretu, E.)
Abstract	This paper provides the first experimental validation of the predictions by two recently introduced models for free molecule squeezed film damping. Measurements were carried out using a parallel-plate microstructure with a 2.29 µm gap operated at air pressures from $10^{5}$ down to $10^{1}$ Pa (corresponding to Knudsen numbers from 0.03 to 300). Experiments are in good agreement with the modeling based on molecular dynamics at low pressures. The results also indicate that modeling based on the modified Reynolds equation including inertia effects underestimates the damping due to end effects, but correctly predicts the trend at lower Knudsen numbers reaching into the transitional regime.
Starting Page	1425
Ending Page	1428
File Size	1798083
Page Count	4
File Format	PDF
ISBN	9781424441907
e-ISBN	9781424441938
DOI	10.1109/SENSOR.2009.5285840
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Damping Micromechanical devices Predictive models Microstructure Navier-Stokes equations Industrial electronics Viscosity Fluid flow Transducers USA Councils damping ratio Squeezed film damping Free molecular regime MEMS second order system
Content Type	Text
Resource Type	Article

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