NDLI: Piezoelectric modal sensors/actuators based on microplates applying surface electrode patterning

Content Provider	IEEE Xplore Digital Library
Author	Sanchez-Rojas, J.L. Hernando, J. Donoso, A. Bellido, J.C. Gutierrez, L.M. Ababneh, A. Seidel, H. Schmid, U.
Copyright Year	2009
Description	Author affiliation: Dept. Microsystems Technology, Vienna University of Technology, Floragasse 7, 1040 , Austria (Schmid, U.) \|\| University of Castilla-La Mancha, ETSI Industriales, 13071 Ciudad Real, SPAIN (Sanchez-Rojas, J.L.; Hernando, J.; Donoso, A.; Bellido, J.C.; Gutierrez, L.M.) \|\| Micromechanics, Microfluidics/-actuators, Saarland University, 66123 Saarbruecken, Germany (Ababneh, A.; Seidel, H.)
Abstract	We demonstrate an advanced design procedure to fabricate resonators based on flexible plates with piezoelectric films. Two design strategies are considered: i) optimized response (actuation or sensing) in a given mode; ii) implementation of a modal transducer by filtering specific modes. Sensors/actuators were designed by optimizing the surface electrode shape in both dimensions. A numerical finite element procedure, which considers the effective surface electrode covering the piezoelectric film as a binary function on each element, has been developed. Microcantilevers and microbridges were fabricated and their modal response characterized by laser Doppler vibrometry. Our calculations allowed us to predict, for a given mode in a plate with arbitrary boundary condition, the top electrode layout with higher displacement in resonance than any other electrode design for the same structure. Our experiments show that the implemented designs can suppress the contributions of different modes simply by shaping the surface electrodes.
Starting Page	2346
Ending Page	2349
File Size	3310994
Page Count	4
File Format	PDF
ISBN	9781424441907
e-ISBN	9781424441938
DOI	10.1109/SENSOR.2009.5285443
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Piezoelectric actuators Electrodes Piezoelectric films Design optimization Piezoelectric transducers Resonator filters Filtering Sensor phenomena and characterization Shape Finite element methods plate resonator Modal sensor piezoelectric cantilever
Content Type	Text
Resource Type	Article

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