NDLI: Tactle array sensor with inclined chromium/silicon piezoresistive cantilevers embedded in elastomer

Content Provider	IEEE Xplore Digital Library
Author	Sohgawa, M. Mima, T. Onishi, H. Kanashima, T. Okuyama, M. Yamashita, K. Noda, M. Higuchi, M. Noma, H.
Copyright Year	2009
Description	Author affiliation: Advanced Telecommunications Research Institute International, Seika, Kyoto, JAPAN (Noma, H.) \|\| Kyoto Institute of Technology, Matsugasaki, JAPAN (Yamashita, K.; Noda, M.) \|\| Osaka University, Toyonaka, JAPAN (Sohgawa, M.; Mima, T.; Onishi, H.; Kanashima, T.; Okuyama, M.) \|\| Omron Corporation, Kizugawa, Kyoto, JAPAN (Higuchi, M.)
Abstract	Tactile array sensor of the micro-cantilevers embedded in the elastomer has been fabricated to detect normal and 2-axes shear stresses. It is demonstrated that tactile array sensor with 3 × 3 detective elements can be fabricated with excellent yield. The sensor element is sensitive to both normal and shear stresses applied on entire sensor surface. Moreover, it has good directional characteristics so that it is shown that magnitude and direction of shear stress can be obtained by difference of output voltages of adjacent sensor cantilevers. The sensor output has good reproducibility for multiple measurement. The output from sensor element drastically changes with shifting applying position of force. It is considered that we can obtain pressed position from distribution of output from sensor element array.
Starting Page	284
Ending Page	287
File Size	1339004
Page Count	4
File Format	PDF
ISBN	9781424441907
e-ISBN	9781424441938
DOI	10.1109/SENSOR.2009.5285509
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Sensor arrays Chromium Silicon Piezoresistance Sensor phenomena and characterization Stress Tactile sensors Voltage Reproducibility of results Force sensors shear force detection tactile sensor micro cantilever polydimethylsiloxane surface micromachining
Content Type	Text
Resource Type	Article

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