NDLI: Micro accelerometer using screen printed BaTiO film on ceramic substrate

Content Provider	IEEE Xplore Digital Library
Author	Suzuki, M. Kobayashi, Y. Aoyagi, S. Tajiri, H. Nagahata, T.
Copyright Year	2009
Description	Author affiliation: Kansai University, Osaka, JAPAN (Suzuki, M.; Kobayashi, Y.; Aoyagi, S.) \|\| ROHM CO., LTD., Kyoto, JAPAN (Tajiri, H.; Nagahata, T.)
Abstract	The concept of MEMS sensors directly fabricated on a ceramic substrate, which can be used for a package of end product, was proposed. A micro accelerometer utilizing a fringe capacitance formed in a ferroelectric substrate was focused on. For this sensor, in stead of a previously used bulk PZT plate, a screen-printed BaTiO (BTO) film on an alumina substrate was employed in this study. A screen-printing method can save the amount of raw material of the film, because a comparatively thick film can be deposited only on a specified area. Moreover, BTO does not contain harmful lead material. The optimal condition for fabricating a BTO film with minimum unwanted surface defects was experimentally searched. The number of defects was decreased by employing a metal barrier of Pt layer underneath BTO, and by setting the annealing temperature for crystallization to a higher value of 1,400°C. A comparatively high relative dielectric constant of ε =926 was achieved. An accelerometer using a BTO film was practically fabricated. The sensitivity of it was estimated as 0.1 pF/G, the order of which is the same as the previously developed accelerometer using a PZT plate.
Starting Page	1174
Ending Page	1177
File Size	2768617
Page Count	4
File Format	PDF
ISBN	9781424441907
e-ISBN	9781424441938
DOI	10.1109/SENSOR.2009.5285912
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers Substrates Ferroelectric films Micromechanical devices Ceramics Packaging Capacitance Ferroelectric materials Raw materials Thick films screen printing method accelerometer BaTiO3 ferroelectric film
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in