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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Letter from the chairs

Conference organizers

Patrons & exhibitors

Conference at a glance

Table of contents

Wireless integrated microsystems: Wearable and implantable devices for improved health care

Wafer level packaging of MEMS

An optimized Cu-Ni nanocomposite coil for low-power electromagnetic microspeaker fabrication

A latchable paraffin actuated high-pressure microfluidic valve

Bistable switching with a thermoelectrically driven thermopneumatic actuator

Mass-production-oriented ionic polymer actuator based on engineered material structure

A bistable SMA microactuator with large work output

Tangential and perpendicular driving micro transmission systems based on ratchet mechanism and electrostatic actuator

Metal core piezoelectric toughness fiber

Outer shell actuator driving central bending shaft by balloon arrays circumferentially-arranged inside of shell

Rapid detection of bacterial cell from whole blood: Integration of DNA sample preparation into single micro-PCR chip

A polymer cell chip with in situ monitoring capability of cell viability for cadmium cytotoxicity test of human rhabdomyosarcoma cells

Preventing cardiomyocytes from TNF-α-induced cell death based on the impedance-sensing technique for real-time monitoring cell adhesion

Open-access cell array using electroosmotic flow

A dielectrophoretic cell/particle separator fabricated by spiral channels and concentric gold electrodes

Quantitative immunophenotyping of circulating tumor cells in blood using microfluidic screening chip integrated with hyperspectral microscope

A patch-clamp device with cell sorting and positioning functions

Surface acoustic wave (SAW) biosensor system with an indirect microfluidic flow injection analysis system

Development of a glutamate biosensor based on glutamate oxidase using smart-biochips

Ewod based microfluidic system with coplanar electrodes for parallel DNA ligation of ultramicro volume

Self-aligned micro contact printing using MEMS

A high sensitivity carbon nanotubes enhanced PZT diaphram-based immunosensor array

Two-phase mini-separator to separate alpha-fetoProtein from fibrinogen and Immunoglobulin

A microchip for automated extraction of RNA from Gram-positive bacteria

Thermal analysis of peptides with a calorimeterchip

Autonomous microfluidic sensing device employing liquid crystal for detection of biological interactions

A multi-function, microfluidic module for mutation detection

Fabrication of a controllable bio-micropump driven by skeletal muscle cells

Prototype micro gas chromatograph for breath biomarkers of respiratory disease

Single-side micromachined low-cost quad-cantilever sensors with a high-sensitive monolayer self-assembled for trace TNT detection

Rapid thermal analysis of energetic materials with microfabricated differential scanning calorimeters

Polymer composite coated multifiber array microelectrodes as multifunctional voltammetric microsensor for the detection of dopamine

Chemoresistive nanofibrous sensor array and read-out electronics on flexible substrate

Nanoscale chemiresistor arrays with patterned nanoparticle interface layers for micro gas chromatography

Disposable chemical and biological sensors using micro-imprinted stimuli-responsive hydrogel diffraction grating

Vacuum-gapped film bulk acoustic resonator for low-loss mass sensing in liquid

Self-patterned seedless gold electroplating in high-aspect-ratio channels for μGC applications

Chip scale packaging of piezoresistive pressure sensors using the dry-film shielding

A new method for hermeticity measurements using porous ultra low k dielectrics for sub-ppm moisture detection

Strength evaluation of lead-free-solder joint fabricated by reactive film local heating

Parylene background fluorescence study for biomems applications

Young's modulus and fatigue lifetime improvements by diamond size effect on electroplated Ni-diamond nanocomposite

Fabrication of monolithic flow sensor on tube structure

A novel method for amorphous metal micromolding using Carbon MEMS

CMOS-compatible three dimensional buried channel technology (3DBCT)

A novel Parylene/Al/Parylene sandwich protection mask for HF Vapor release for micro electro mechanical systems

Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes

In-plane microneedle chip fabricated by crystalline wet etching of (110) silicon wafer

Hermetic thin film encapsulation of mechanical transducers for smart label applications

Dry self-alignment for batch-assembly of chips

Aspect ratio dependent etch modulation for CMOS-MEMS applications

Micromolding methods for hollow microneedle arrays using megasonically enhanced casting

A bio-inspired, chemo-responsive polymer nanocomposite for mechanically dynamic microsystems

Development of highly roughened porous Au electrode with Pt nano-particle for electrochemical sensor applications

Van-der Waals thin-film C MEMS

Fabrication of flexible 3D microelectrode aray with parylene-based pattern transfer technique

Optofluidic packaging of silicon microchips for applications in light emitting devices

Development and evaluation of AuSi eutectic wafer bonding

CMOS-compatible back-end process for in-plane actuating ferromagnetic MEMS

Functionality of a novel overload resistant silicon high pressure sensing element

An intelligent wind sensor system with auto-zero function

A monolithic integrated micromachined piezoresistive flow sensor

High-GF planar aluminium-silicon hybrid strain transducers

Temperature-insensitive silicon carbide resonant micro-extensometers

A MEMS sensor for mean shear stress measurements in high-speed turbulent flows with backside interconnects

A low-cost integrated micro system for flow velocity and direction measurement

A simple micro pirani vasuum gauge fabricated by bulk micromachining technology

Tactle array sensor with inclined chromium/silicon piezoresistive cantilevers embedded in elastomer

A lateral-axis micromachined tuning fork gyroscope with novel driving and sensing combs

An investigation of decoupling performance for a novel lateral axis gyroscope with varying environmental parameters

A doubly decoupled micromachined vibrating wheel gyroscope

A MEMS-based dual-axis tilt sensor using air medium

Predictive thermal model for indirect temperature measurement inside atomic cell of nuclear magnetic resonance gyroscope

Characterization of a quarts MEMS tilt sensor with 0.001º precision

Longitudinal bulk a coustic mass sensor

Design and prototyping of a MEMS-based crackmeter for structural monitoring

Diaphragm stress control for sensitivity improvement of piezoelectric ultrasonic microsensors on silicon dioxide diaphragms

Longitudinal and transverse coiled giant magnetoimpedance transducers principle, modeling and performances

Fabrication and testing of a MEMS based earth sensor

Polarization-analyzing image sensor based on standard CMOS technology

Integrated SiO microtube-based electrical neuroprobe array

Microfabricated neural thermocouple arrays probe for brain research

Arrowhead-shaped micro-electrode array on polyimide substrate for retinal prostheses enabling close approach to target cells

Catheter type of flow sensor for trans-bronchial measurement forlung functions

A novel endoscopic oidrs system for non-invasive early diagnosis of esophageal cancers

Capacitive micromachined ultrasonic transducer (CMUT) for MR-guided noninvasive therapeutic ultrasound applications

Wireless in vivo EMG sensor for intelligent prosthetic control

Curvature affects superhydrophobicity on flexible silicone microstructured surfaces

A micro-fabricated capillary electrophoresis chip for DNA pre-concentration and separation

Micro blender and separator using inner-vortex of droplet induced by surface acoustic wave

Synthesis of twin alginate microparticles via microfluidic emulsification and sorting

Chitosan microfiber fabrication using microfluidic chips of different sheath channel angles and its application on cell culture

Temperature controlled miniaturized cell in magnetic beads handling system for bio-chemical reaction

Micromachined tube-type of Si droplet generator

On-chip phase shift refractometer via microfluidic liquid grating

A new method of particulate separation by different dielectrophoretic holding force

Wetting properties of silicon mesh microchannels coated with SiO nanoparticles using layer-by-layer nano self assembly

Super wetting of micro &nano structured titania surfaces

An anti-adhesion technique reducing particle-loss using electrodynamic distrurbance for aerodynamic chip

Phaseguide patterns for advanced liquid handling in Lab-on-a-Chip systems

Droplet transportation using EWOD-induced wettability gradient

A novel passive microfluidic device for preprocessing whole blood for point of care diagnostics

Near-field ion flow for molecular scale manipulation

High-throughput on-chip flow cytometry system using “microfluidic drifting” based three-dimensional (3D) hydrodynamic focusing

Sorting microparticles by orientation using wedged-fin and railed microfluidics

A quaternary microfluidic multiplexer using dynamic control of pressure valves having different thresholds

A microfluidic device to control bio actuators of microorganisms, an application to Vorticella convallaria

Dual-scaled stable superhydrophobic nano-flower surfaces

Using an ultrasonic vibration microfluidic chip to generate UV-crosslinking microparticles

Fabrication of molecular-scale patterns with chemically tunable functionalities

Mesoporous thin films as versatile sensitive matrices on Love wave sensors for fast sub-ppm vapor detection

Micro tactile sensors with a suspended and oriented single walled carbon nanotube beam embeded in PDMS elastomer

Pore formation in inorganic-organic hybrid material by oxygen plasma treatment

Analysis and applications of nanostructures created by stencil lithography

Ultra thin AlN piezoelectric nano-actuators

Multifunctional nanowire array for chemical sensing and manipulation

Junction based enhancement in nanowire thermoelectrics

Integrated photonic MEMS chemical sensors

An uncooled microcantilever IR detector based on bulk silicon technique

Coupling of quantum states with mechanical heterostructures

A tunable hydrogel microlens array with light-switching capability

Laser induced self-aligned microlens and waveguide arrays using a self-writing process in a photosensitive polymer resin

Rapid scanning delay line for optical coherence tomography based on the thermo-optic effect in silicon

Connection characteristics of silicon nanowire waveguides and fabrication of physical contact switches

Mems-based mechanically tunable flexible photonic crystal

Energy harvesting by MEMS vibrational devices with electrets

High performance piezoelectric MEMS energy harvester based on D33 mode of PZT thin film on buffer-layer with PBTIO3 inter-layer

A hybrid generator for virbration energy harvesting applications

Development of a simplified hybrid ambient low frequency, low intensity vibration energy scavenger system

CM-scale air turbine and generator for energy harvesting from low-speed flows

Rapid prototyping of micro-direct methanol fuel cell in PDMS with microchannel-integrated Nafion strip

Electrodeposited thin-layer electrodes for the use in potentially implantable glucose fuel cells

Development of SPDT-structured RF MEMS switch

Integration of tunable capacitors and bonded-wires for contactless RF switch and tunable filter

Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniques

Development of a new miniaturized 300-MHZ frequency band antenna for wireless microsensor nodes

High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters

Enhanced transduction methods for electrostatically driven MEMS resonators

Modeling and fabrication of piezoelectric Aluminum Nitride resonator and its application in oscillators

Silicon carbide MEMS oscilator

Linearly variable inductor with RF MEMS switches to enlarge a continuous tuning range

Ultra-thin Super High Frequency two-port ALN contour-mode resonators and filters

Individual nanowire chemical sensor system self-powered with energy scavenging technologies

Ultra-low power metal-oxide gas sensor on plastic foil

Microreactors for synthetic diesel production to optimize nanostructured cobalt catalyst

Novel dual transient temperature modulation technique for multi-vapour detection

Nanostructured polymer transistors for volatile organic compound detection

A novel method of self-assembling siloxane bi-layer directly on SiO surface of micro-cantilever for long-term repeatable sensing to trace explosives

Unidirectional cellular durotaxis via microfabricated posts of varying anisotropy

Localized cell lysis by Self Focused Acoustic Transducers

Hydrodynamic single-cell trapping for cellular assays

Leukocyte count and two-part differential in whole blood based on a portable microflow cytometer

Lateral-driven continuous magnetophoretic microseparator for separating blood cells based on their native magnetic properties

Microfluidic-driving multi-function manipulation array of micro-scale biological sample via ac electroosmosis

Large scale microfluidic systems for sequential trapping, labeling and content extraction of single cells

Non-resonant bi-stable frequency-increased power scavenger from low-frequency ambient vibration

Effect of nonlinear external circuit on electrostatic damping force of micro electret generator

Magnetoelectric nanoscale magnetic-field generator

A MEMS turbopump for fuel delivery in small-scale power systems

An air-breathing silicon-based micro direct methanol fuel cell with a capillary-based water drawn out structure

An integrated microfluidic self-regulating and self-circulating hydrogen generator for fuel cells

Liquid-semiconductor-based micro power source using radioisotope energy conversion

Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode

Laterally-driven deformation-robust MEMS gyroscopes with three sets of symmetrically arranged folded-beam suspensions

Design, fabrication and testing of a micromachined seismometer with NANO-G resolution

Design and implementation of high performance CMOS-MEMS capacitive sensors

A digital accelerometer using a microscale liquid-metal droplet in photosensitive glass channel

Design and implementation of liquid droplet based motion sensing

One-dimensional-motion and pressure hybrid sensor fabricated and process-level-packaged with CMOS back-end-of-line processes

Energy loss in MEMS resonators and the impact on inertial and RF devices

Oscillating behavior of quality factor of a film bulk acoustic resonator in liquids

Q-enhancement through minimization of acoustic energy radiation in micromachined lateral-mode resonators

Tuning the quality factor of microcantilever using hydrodynamic coupling of micro structures

Frequency scaling and transducer efficiency in internal dielectrically transduced silicon bar resonators

Optical detection in microfluidics: From the small to the large

A novel optofluidic evanescent waveguide sensor system for fluorescence spectroscopy fabricated by micro-stereolithography

A microcantilever sensor with integrated optical readout for antimicrobial drug discovery

A combined enhanced-fluorescence and label-free imaging instrument

Enhancing dna microarray detection limits using optical resonances from photonic crystal surfaces

CMOS-integrated sige MEMS: Application to micro-mirrors

A new highly selective sacrificial layer technology for SiC MEMS

Selective electrochemical release etching of eutectically bonded microstructures

Continuous Cellular Automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching

Surfactant in TMAH for new shapes of silicon MEMS components; Its orientation dependent adsorption detected by infrared spectroscopy

Silicon nanopore membrane technology for an implantable artificial kidney

On-chip lobule-mimetic construction of heterogeneous cells and CO-cuture via a logarithmical-concentration varying bioreactor

A neuron-benign microfluidic gradient generator for studying the growth of mammalian neurons towards axon guidance factors

Autonomous beating and fluid pumping gel by cardiomycytes drug stimulation

Electrical recording of lipid membrane in a microfluidic device

An RFMEMS based reflection type C-Ku band tunable band pass filter

Digitally-specified micromechanical displacement amplifiers

On-chip soft-ferrite-integrated inductors for RF IC

A comprehensive study for dielectric charging process in silicon nitride films for RF MEMS switches using Kelvin Probe Microscopy

Investigation of anti-stiction coating using π-conjugated hydrophobic self-assembled monolayer for ohmic contact MEMS switch

Oscillator far-from-carrier phase noise reduction via nano-scale gap tuning of micromechanical resonators

100 picoliter droplet handling using 256 $(2^{8})$ microvalve array with 18 multiplexed control lines

High throughput DNA methylation analysis on a droplet-in-oil polymerase chain reaction array

On-demand double emulsification utilizing pneumatically actuated multilayer PDMS microstructures

Droplet formation and fusion for enzyme activity measurement by liquid dielectrophoresis

Micro-pillar barriers for guiding, mixing and sorting droplets

Capturing, carrying, and releasing of micro-objects by AC-electroweting-actuated oscillating bubbles

A low voltage capillary microgripper using electrowetting

Programmable batch assembly of microparts with 100% yield

Room-temperature wafer-level hermetic sealing for liquid reservoirs by gold ring embossing

Highly reliable and manufacturable in-line wafer-level hermetic packages for RF MEMS variable capacitor

A detailed study of yield and reliability for vacuum packages fabricated in a wafer-level Au-Si eutectic bonding process

Full wafer integration of shape memory alloy microactuators using adhesive bonding

Wafer level fabrication of high performance MEMS using bonded and thinned bulk piezoelectric substrates

Fabrication of Einzel lens array with one-mask RIE process for electron micro-optics

Unobstructing magnetic microactuators for implantable catheters

A new magnetically actuated switch for precise position detection

Laser-printed magnetic-polymer microstructures

Superparamagnetic photosensitive polymer nanocomposite for microactuators

The double-side electroplating and slender ferromagnetic patterns torque-enhancement design for magnetostatic actuator

2D CMOS integrated magnetometer based on the miniaturized circular vertical Hall device

The magnetic calibration of arbitrarily shaped Hall sensors in the absence of magnetic fields

An electromagnetically actuated microspeaker with fully-integrated wax-bonded Nd-Fe-B micromagnets for hearing aid applications

Large stroke high force pneumatic actuators fabricated by SU-8 micromachining

Robustness of electrostatic MEMS actuators against electrical overstress

Conceptual design of mniniature tunable stiffness display using MR fluids

Polycrystalline silicon carbide NEMS for high-temperature logic

Magnetic torque driving 2D micro scanner with a non-resonant large scan angle

Self-aligned electrostatic angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators

Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly

2-dimensional potassium ion image sensor aiming for Label-free dynamic imaging of living-cell activity

A power-free blood plasma extraction device based on planar crossflow filter microstructure

Applications of a novel cell micropatterning process for long-term neuron and cell culture

Microsystems for determining the heterogeniety of head and neck cancer cell populations by para-magnetophoresis

TISSUE-MIMICKING IN VITRO ANALYSIS SYSTEM to exclusively stimulate single cell and detect its physiological reaction

Wireless-compatible CMOS-based celluar sensor

Microfluidic protein synthesis array for toxin detection

A regenerative biosensing surface using electrochemical desorption of self-assembled monolayer in microfluidics

Early diagnosis of cancer by electrical detection of nucleic acid biomarkers

Automatic on-chip sequential processing for bio-microsystems

Coulometric detection of an analyte in a liquid plug formed in a microflow channel

Microcantilever sensor using photonic crystal nanocavity resonator

MWCNTS array incorporated nanochannel with charge-selectivity for high efficient biomolecule preconcentration

Hydrophilic modification of multi-walled carbon nanotubes based neural microelectrode array

Carbon nanotube labeled immunosensor for lateral flow diagnostics

Two-dimensional label-free acetylcholine image sensor for imaging neuronal communication

Continuous monitoring of insulin attachment kinetics on photothermally actuated microcantilever biosensor

A micro gas preconcentrator with improved performances for environmental monitoring

Hyper-branched sensing polymers self-assembled on resonant micro-cantilever sensors for ultra-low concentration DMMP vapor detection

An accelerator based neutron gun micro-fabricated with ceramic/metal packaging

Simultaneous and wireless measurement of CO and NO using a saw reflective delay line

A slab waveguide sensor for a fully integrated IR-absorption sensor system - theoretical and experimental verification

Optimising a Nitric oxide sensing technique for hypoxic tumor cell cultures

A chemical sensing microsystem utilizing an adaptive feedback circuit

High-performance humidity sensor with polyimide nano-grass

Array type dissolved oxygen sensor and measurement system for simultaneous measurement of cellular respiration level

MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environment

Multiparametric light-assisted silicon device transduction of molecular recognition events

Parylene to silicon adhesion enhancement

Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC

Bi as an active material for MEMS based devices fabricated at room temperature

Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer

Encapsulation of microparticles and biomolecules based on layer-by-layer nanoassembly techniques with microfluidic droplet devices

Exploratory corrugated infrared hot-electron transistor arrays

Thin film diffusion barrier formation in PDMS microcavities

Planar sacrificial surface micromachining by nickel silicide

Three-dimensional microstructures fabricated by multi-step electrochemical etching of aluminum sheet

Novel scanning immersion lithography (SIL) for 3D microfabrication

Prediction of strength and fatigue lifetime of MEMS structures with arbitrary shapes

Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewalls

Fabrication of dense flow sensor arrays on flexible membranes

Selective vapor-liquid-solid growth of needle arrays by hotwire chemical vapor deposition with low substrate temperature

Ohmic contacts on n-type polycrystalline silicon carbide with Ti/TaSi/Pt

Stress and strain gradient control of polycrystalline SiC films

Suspended microstructures made using silicon migration

Wafer reconstitution with precision dry front-to-front registration

Creating microstructures in electrospun nanofibers using a micropatterned collector chip

Characterizations and optimization of electrical contact between nanocomposite elastomer and metal

3D high aspect ratio, MEMS integrated micro-solenoids and Helmholtz micro-coils

Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon

Design, fabrication, and assembly of a hollow-core fiber-based micro cryogenic cooler

A novel monolithically integrated pressure, accelerometer and temperature composite sensor

A Multi-Terminal Pressure Sensor with enhanced sensitivity

Simulation and fabrication of a 2D-flow sensor for thermal characterization of fluids and for flow speed measurements

Pressure stable thermoelectric flow sensors by means of membrane perforation

Single element 3-terminal pressure sensors: A new approach to pressure sensing and its comparison to the half bridge sensors

Using encapsulated MEMS resonators to measure evolution in thin film stress

Fiber-optical acoustic sensor based on a photonic-crystal diaphragm

Transparent and flexible tactile sensor for multi touch screen application with force sensing

High sensitivity ultrasonic transducer array for 2-D hydropohone application, using an epitaxial PZT thin film grown on γ-Al/Si

A novel soi Z-axis accelerometer with gap closing differential sensing electrodes

A new z-axis capacitive accelerometer with high impact durability

The development of novel surface acoustic wave MEMS-IDT gyroscope based on standing wave mode

A digital output piezoelectric accelerometer using CMOS-compatible AlN thin film

Design and fabrication of convective inertial sensor consisting of 3DOF gyroscope and 2DOF accelerometer

Micro accelerometer using screen printed BaTiO film on ceramic substrate

A micromachined suspended plate viscosity sensor featuring in-plane vibrations and integrated piezoresistive readout

Single pulse proximal distance sensor with thermoacoustic transmitter

New polysilicon sensor and actuator technology for the development of a thermal platform

Micro- and nanostructured magnetic field sensor for space applications

Parametrically amplified MEMS magnetometer

Flash type MEMS-based Analog-to-Digital Converter of field emission

Implantable polycrystalline diamond neural probe for in vivo and in vitro physiological recording

Fabrication of 3-dimensional silicon microelectrode arrays using micro electro discharge machining for neural applications

Wafer-scale processed, low impedance, neural arrays with varying length microelectrodes

An endoscope utilizing tunable-focus microlenses actuated through infrared light

Biosensor for calcium based on a hydrogel optical waveguide with integrated sensor proteins

CMUT-in-CMOS ultrasonic transducer arrays with on-chip electronics

A quadrupolar magnetic actuation system for superparamagnetic particles

Vacuum supported liquid waste handling for dna extraction on centrifugally operated Lab-on-a-Chip systems

High-performance magnetic active-valve micropump

Magnetic particle dosing, release and separation in a microfluidic chip with magnetic actuation

Microfabricated out-of-plane arrays of integrated capillary nano-electrospray emitters

A new platform for manipulation and separation of oil-in-water emulsion droplets using optically induced dielectrophoresis

On-chip droplet enhanced fluorescence emission for low concentration protein measurement

Improvement of detection sensitivity using electrodes with micropillar structures

Local stimulation to single cell on tissue-mimicking microfluidic device

Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor

Liquid recirculation in microfluidic channels by the interplay of capillary and centrifugal forces

A digital dilution chip using the selective control of inter-well valves

A bonding-free process for fabricating integrated microfluidic devices with embedded electrodes utilizing low-cost UV curable resins

An air-bubble-actuated micropump for on-chip blood transportation

Hybrid integrated platform of PDMS microfluidics and Silica Capillary for effective CE and ESI-MS coupling

Simulation and optimization of transport in a Linear Brownian motor

A thermally actuated microfluidic relay valve

Propulsion and steering of a floating mini-robot based on Marangoni flow actuation

Differential impedance spectrometer and vision system for analysis of single cells

A fully addressable micro-array chip integrated with cascade multiplexors for selective cell loading and retrieval

Fabrication and process characterization of atom transistor chips

Development of 100-nm-thick self-sensing nanocantilevers and characterization of the temperature dependence of the piezoresistivity and conductivity

A H microsensor based on nanocolumnar tungsten oxide grown by template-assisted anodization

Stress-assistant selective etching mechanism for lithography-independent nanofabrication

Young's modulus measurement method for nano-scale film materials by using MEMS resonator array

Organic emitting layer formation with microfluidic channel for multi-colored OLED array

Patterning high density SWNT networks on flexible Parylene-C substrate

Sensitivity enhancement of piezoresistive micro acceleration sensors with Nanometer Stress Concentration Regions on sensing elements

Fabrication and characterization of multiple nanowires using microtubule structures

Design of a novel microreactor for microfluidic synthesis of silica nanoparticles

Pitch-variable MEMS grating with 4-level blazed surface

GaN-LED grown on Si substrate by MBE/MOCVD and monolithic fabrication of a light distribution variable device

Characteristics of micromachined injection locking lasers

MEMS tunable Fabry-Perot Filters with thick, two sided optical coatings

Thermo-optic infrared focal plane array

Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

CMOS-MEMS knife-edge optical spot profiling system

Self-powered optical sensor systems

Hyperspectral imaging using a micromachined in-plane vibratory grating scanner

An electrostatic energy harvester with electret bias

Temperature threshold tuning of a thermal harvesting switch

Harvesting energy from vehicle wheels

Microstructured polymer for shoe power generation

Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membrane

Symmetric silicon micro fuel cell with porous electrodes

MEMS frequency detector at X-band based on MMIC technology

High temperature stable RF MEMS switch based on tungsten-titanium

Piezoresistive ring-shaped MEMS resonator

Model for predicting spurious modes caused by fringing fields in lateral electrostatic actuators for MEM resonators

Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodes

Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Contactless electromagnetic interrogation of a MEMS-based microresonator used as passive sensing element

56 MHZ piezoresistive micromechanical oscillator

High-Q, gallium nitride nanowire-ALD composite mechanical resonators

7MHZ length-extensional soi resonators with T-shaped anchors

Quality factor enhancement in micromechanical resonators at cryogenic temperatures

A novel lab-on-a-tube for multimodal monitoring of patients with traumatic brain injury

Implantable fluorescent hydrogel for continous blood glucose monitoring

A capacitively based MEMS affinity glucose sensor

A parylene bellows electrochemical actuator for intraocular drug delivery

pH-responsive drug-delivery devices for implantable applications

Implantable multi sensor system for in vivo monitoring of cardiovascular parameters

A wireless batteryless in vivo EKG and body temperature sensing microsystem with adaptive RF powering for genetically engineered mice monitoring

SS-DNA-decorated Single-Walled Carbon Nanotubes integrated on CMOS circuitry for high sensitivity gas sensing

Nano-pillar structure for sensitivity enhancement of SPR sensor

A direct-write piezoelectric PVDF nanogenerator

Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor

A high sensitivity single-walled carbon-nanotube-array-based strain sensor for weighing

A gold nanoparticles dispersion waveguide for label-free detection

Direct formation of parallel single-walled carbon nanotube bridges on micromachined wide trenches for high-performance infrared sensors

Single mask 3-phase electrostatic rotary stepper micromotor

A CMOS-MEMS rotary microactuator suitable for hard disk drive applications

A photovoltaic PN-junction vertical comb-drive micro-actuator

Sphincter-like micro actuators based on electroactive polymer

2-axis MEMS deflecting cantilever microinstrument for in-situ reliability studies

Frequency-selectable wireless actuation of hydrogel using micromachined resonant heaters toward implantable drug delivery applications

“Artificial flagellates” selective attachment of flagella as a bioactuator of micro-object

A piezo-actuated closed loop MEMS system for active delay of transition

A metal-on-silicon differential capacitive shear stress sensor

Highly-sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows

Exploitation of aeroelastic effects for drift reduction in an all-polymer air flow sensor

Material discrimination by heat flow sensing

Micromachined piezoelectric microphone with high signal to noise ratio

Sensitivity enhancement by micro Helmholtz resonator for ultrasonic distance sensor

Nanofluidics: Fundamentals and applications

A new technique to construct the micro and nano fluidic system using a single wall carbon nanotube

Microfabricated multi-turn gradient coils for microscale flow imaging

Multiplexed analysis of inflammation biomarkers using spectrally-encoded on-chip electrophoresis

Microfluidic two-dimensional IEF-CZE for proteomics

Optoelectronic tweezers — a new parallel optical manipulation tool

Surface plasmon tweezers-induced nanoparticle patterning in microfluidics

A new platform for manipulating a single DNA molecule by using opticallay-induced dielectrophoresis

Microfluidic integrated optoelectronic tweezers

Sorting of differentiated neurons using Phototransistor-based optoelectronic tweezers for cell replacement therapy of neurodegenerative diseases

Materials and mechanics for stretchable electronics - from electronic eye cameras to conformal brain monitors

High aspect ratio microelectromechanical systems: A versatile approach using carbon nanotubes as a framework

A three-dimensional silicon shadowmask for patterning on trenches with vertical walls

Minimized blurring in stencil lithography using a compliant membrane

Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist

Cantilever sensors equipped with nano sensing effects for ultra-sensitive detection of bio/chemical molecules

An array of monolithic FBAR-CMOS oscillators for mass-sensing applictions

High Q factor plate resonators for ultrasensitive mass sensing applications

Interferometric force sensing AFM probes for nanomechanical mapping of material properties

Tip-matter interaction measurements using mems ring resonators

Microfluidic high-resolution NMR chip for biological fluids

CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications

Selective detection of chemical species in liquids and gases using radio-frequency identification (RFID) sensors

A micro gas chromatograph for high-speed determinations of explosive vapors

Low leak rate mems valves for micro-gas-analyzer flow control

Selective preconcentration by temperature manipulation of cascaded micro preconcentrators

High-speed two-dimensional gas chromatography using microfabricated GC columns combined with nanoelectromechanical mass sensors

CMOS based sensors for biochemical analysis

Subcellular-resolution recording of electrical activity using a CMOS-microelectroode system

The role of surface charge and binding properties in silicon-based field effect nanowire biosensors

Multisite field potential recording from retina via vapor-liquid-solid grown silicon probe array

Miniaturized reference electrode with a negative feedback function for potential stabilization

A magnetic-bead based microfludic system for rapid detection of immunoglobulins

In-situ formation of an ion-doped porous structure for high sensitive humidity sensing utilizing low-cost UV sensitive glue

Silver nanoparticle structures realized by digital surface micromachining

New electrical connection technology for microsystems using inktelligent $printing^{®}$ and functional nanoscaled INKS

Mechanical characterization of CMOS metal layers

Implementation of a novel zero-insertion-force (ZIF) mems-connector

Mechanical degrandation mechanism of aluminum-alloy structural films evaluated by environment-controlled tensile testing

Microfabricated, ultra-dense, three-dimensional metal coils

Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterials

Torque measurements of an automotive halfshaft utilizing a MEMS resonant strain gauge

Implementation of a monolithic TPMS using CMOS-MEMS technique

Novel extension methods of the sensing pressure range of the Pirani vacuum sensor

Out-of-plane microwire force sensor arrays with embedded p-n diodes by selective vapor-liquid-solid growth

New electromagnetic transduction micro-sensor concept for passive wireless pressure monitoring application

Development of fabric force sensor for detecting normal and lateral force by applying umbonal fiber

Quantitative volume determination of dispensed nanoliter droplets on the fly

Scalable cascaded snap-in actuators for large-stroke displacements

3DOF equivalent circuit model of a comb-drive actuator

Improved performance of large stroke comb-drive actuators by using a stepped finger shape

Off-chip actuation for angular position control of MEMS mirrors

Heating and actuation characteristics of shape memory thin film actuator for blood vessel holding

An ESD preotection device using normally-on MEMS switch

Electroactive surfaces based on conducting polymers for controlling cell adhesion, signaling, and proliferation

Improvement of cell capture efficiency using a reversible DEP field

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4-bit digital liquid lens for variable focal length

Content Provider	IEEE Xplore Digital Library
Author	Dong Woo Lee Young-Ho Cho
Copyright Year	2009
Description	Author affiliation: Digital Nanolocomotion Center, Korea Advanced Institute of Science and Technology, Korea (Dong Woo Lee; Young-Ho Cho)
Abstract	We present 4-bit digital liquid lens for variable focal length using the binary control of four bit actuators (b, b, b, and b actuators). The input volume into the lens is precisely controlled in $2^{4}$ levels depending on the binary control of the bit actuators such as digital actuation mode (b). Compared to previous analog liquid lens, it precisely control lens curvature and focal length. Experimentally, the maximum deflection range of the present lens is 0∼11.6µm and one step of maximum deflection, least significant bit (LSB), is 0.75µm±0.2µm. It also control focal length from 3.63 to 38.6mm in 16 levels.
Starting Page	2306
Ending Page	2309
File Size	563045
Page Count	4
File Format	PDF
ISBN	9781424441907
e-ISBN	9781424441938
DOI	10.1109/SENSOR.2009.5285897
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lenses Actuators Pressure control Apertures Equations Voltage Digital control Optical variables control Beam steering Cellular phones Digital bit actuator Liquid lens Digital actuator Variable focal length
Content Type	Text
Resource Type	Article

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