NDLI: Novel scanning immersion lithography (SIL) for 3D microfabrication

Content Provider	IEEE Xplore Digital Library
Author	Sheu, H.C. Shew, B.Y. Liu, C.W. Peng, C.T. Tseng, S.C.
Copyright Year	2009
Description	Author affiliation: Dept. Mech. Eng., National Yunlin University of Science and Technology, TAIWAN (Tseng, S.C.) \|\| Facility Utilization Group, National Synchrotron Radiation Research Center, Hsinchu, TAIWAN (Sheu, H.C.; Shew, B.Y.; Liu, C.W.; Peng, C.T.)
Abstract	We propose the first time combining the merit of scanning and immersion lithography to fabricate 3D microstructure in this study. Via applying a matching liquid to reduce the diffraction error, the gap between the mask/resist becomes more tolerable. In addition, the liquid also act as a lubricant and a buffer for smooth movement of the mask/substrate. These advantages will benefit the performance of scanning lithography technique. The experimental results show that the large-area, 3D microstructure with excellent surface quality (R≪10 nm) can be successively fabricated based on this method. Besides, 3D microstructures with various geometries and functionalities can be generated by altering the shape of the mask pattern, or changing the scanning directions. The proposed SIL technique seems to be a promising way for fabricating 3D microstructure for optical applications.
Starting Page	1063
Ending Page	1066
File Size	1198238
Page Count	4
File Format	PDF
ISBN	9781424441907
e-ISBN	9781424441938
DOI	10.1109/SENSOR.2009.5285942
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lithography Resists Microstructure Optical refraction Lubricants Geometrical optics X-ray diffraction Synchrotron radiation Lenses Apertures micro optics 3D microfabrication scanning lithography immersion lithography refractive-index matching
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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