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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ran Fang Wengao Lu Chang Liu Zhongjian Chen Yuan Ju Guannan Wang Lijiu Ji Dunshan Yu |
| Copyright Year | 2010 |
| Description | Author affiliation: Key Laboratory of Microelectronic Devices and Circuit, Department of Microelectronics, Peking University, Beijing 100871, China (Ran Fang; Wengao Lu; Zhongjian Chen; Yuan Ju; Guannan Wang; Lijiu Ji; Dunshan Yu) || School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, 30332, USA (Chang Liu) |
| Abstract | A CMOS ASIC has been designed and implemented for readout and control of MEMS vibratory gyroscopes. A low noise design is achieved by using the technique of sinusoidal chopper stabilization with a chopping frequency of 2MHz, which will effectively suppress the low frequency noise. A closed loop control method in driving mode is presented. The Chip is fabricated in a 0.35µm standard CMOS process with an area of $2.5×2.5mm^{2}.$ The test is performed with a vibratory gyroscope on the condition of closed-loop control, and the measurement result shows a detecting resolution of 6aF in 100Hz bandwidth from a single 5V supply. |
| Starting Page | 1456 |
| Ending Page | 1458 |
| File Size | 563474 |
| Page Count | 3 |
| File Format | |
| ISBN | 9781424457977 |
| e-ISBN | 9781424457984 |
| DOI | 10.1109/ICSICT.2010.5667561 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2010-11-01 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Gyroscopes Micromechanical devices Noise Capacitance Oscillators Application specific integrated circuits Low pass filters |
| Content Type | Text |
| Resource Type | Article |
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