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Content Provider | IEEE Xplore Digital Library |
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Author | Ran Fang Wengao Lu Tingting Tao Guannan Wang Zhongjian Chen Yacong Zhang Dunshan Yu |
Copyright Year | 2012 |
Description | Author affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Microelectronics, Peking University, Beijing, 100871, China (Ran Fang; Wengao Lu; Tingting Tao; Guannan Wang; Zhongjian Chen; Yacong Zhang; Dunshan Yu) |
Abstract | In this paper, a high-voltage interface circuit has been designed and implemented for MEMS gyroscope. Continuous-time charge sensitive amplifier with chopping stabilization technique is used in the conversion stage to achieve low noise performance. A closed driving loop for MEMS gyroscope which applying multiple supply voltages is presented. The chip is fabricated in a 0.35um 5V/12V high-voltage process. The test of the chip is performed with a MEMS vibratory gyroscope. The result shows that the driving output of the ASIC can ensure a stable oscillation in the driving axis. |
Starting Page | 1 |
Ending Page | 2 |
File Size | 101476 |
Page Count | 2 |
File Format | |
ISBN | 9781467356947 |
e-ISBN | 9781467356961 |
DOI | 10.1109/EDSSC.2012.6482825 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2012-12-03 |
Publisher Place | Thailand |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Gyroscopes Micromechanical devices Application specific integrated circuits Power supplies Resonant frequency Noise Sensors multiple power supplies capacitive sensing circuit MEMS gyroscope hight-voltage level shifter |
Content Type | Text |
Resource Type | Article |
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