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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Shao-Ming Yang Yin-Huang Lin Gene Sheu Jung-Ruey Tasi Shang-Hui Tu Yu-Lung Chin Jin-Shyong Jan Chia-Hao Lee |
| Copyright Year | 2010 |
| Description | Author affiliation: Department of Computer Science and Information Engineering, Asia University, 500, Lioufeng Rd., Wufeng, Taichung, Taiwan, China (Shao-Ming Yang; Gene Sheu; Jung-Ruey Tasi) || Device Engineering Department, Vanguard International Semiconductor Corp., Hsinchu, 30077, Taiwan, China (Yin-Huang Lin; Shang-Hui Tu; Yu-Lung Chin; Jin-Shyong Jan; Chia-Hao Lee) |
| Abstract | The dependence of the avalanche breakdown voltage on vertically linear doping gradient of the drift region based on Silicon-On-Insulator (SOI) lateral diffuse metal oxide semiconductor (LDMOS) is studied. Vertically linear doping profile (VD) of the LDMOS structure is exhibited to obviously improve safe of operation area (SOA) from the conventional uniform and variable linear doping structure. From the BFOM (Baliga's Figure of Merits), optimal relationship between breakdown voltage and on-state resistance (RonA) is found. The simulation results the breakdown voltage of the VD SOI LDMOS device can be improved by 19%,and 35% and the on-state resistance can be lowered by 19% and 29% at 2µm and 3µm over conventional. A 200 V LDMOS transistor with RonA of less than 800 $mΩ-mm^{2}$ based on various SOI layers is reported. |
| Starting Page | 1838 |
| Ending Page | 1840 |
| File Size | 733821 |
| Page Count | 3 |
| File Format | |
| ISBN | 9781424457977 |
| e-ISBN | 9781424457984 |
| DOI | 10.1109/ICSICT.2010.5667702 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2010-11-01 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Doping Silicon Electric breakdown Resistance Epitaxial growth Semiconductor process modeling Simulation |
| Content Type | Text |
| Resource Type | Article |
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