NDLI: Simultaneous regulation of film thickness, surface roughness and porosity in a multiscale thin film growth process

Content Provider	IEEE Xplore Digital Library
Author	Gangshi Hu Xinyu Zhang Orkoulas, G. Christofides, P.D.
Copyright Year	2009
Description	Author affiliation: Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, 90095 USA (Gangshi Hu; Xinyu Zhang; Orkoulas, G.; Christofides, P.D.)
Abstract	This work focuses on simultaneous regulation of film thickness, surface roughness and porosity in a multiscale model of a thin film growth process using the inlet precursor concentration as the manipulated input. Specifically, a continuous macroscopic partial differential equation model is used to describe the dynamics of the gas phase. The thin film growth process is modeled via a microscopic kinetic Monte Carlo simulation model on a triangular lattice with vacancies and overhangs allowed to develop inside the film. Closed-form dynamic models of thin film surface profile and porosity are developed and used as the basis for the design of a model predictive control algorithm to simultaneously regulate film thickness, surface roughness and film porosity. Simulation results demonstrate the applicability and effectiveness of the proposed modeling and control approach by applying the proposed controller to the multiscale model.
Starting Page	2387
Ending Page	2394
File Size	553196
Page Count	8
File Format	PDF
ISBN	9781424438716
ISSN	01912216
DOI	10.1109/CDC.2009.5399542
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-12-15
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Rough surfaces Surface roughness Transistors Predictive models Partial differential equations Microscopy Kinetic theory Lattices Algorithm design and analysis Predictive control
Content Type	Text
Resource Type	Article

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