NDLI: Dynamic decoupling in motion systems using a gradient approximation-based algorithm

Content Provider	IEEE Xplore Digital Library
Author	Heertjes, M. Hennekens, D. van Engelen, A. Steinbuch, M.
Copyright Year	2009
Description	Author affiliation: Eindhoven Univ. of Tech., The Netherlands (Heertjes, M.; Hennekens, D.; van Engelen, A.; Steinbuch, M.)
Abstract	To reduce cross coupling in the control of multi-input multi-output (MIMO) motion systems having diagonal dominance, a dynamic decoupling design is studied. The dynamic decoupling is used in parallel to a nominal (and static) decoupling with the aim to support a straight-forward single-input single-output (SISO) control design. For a six degrees-of-freedom nano-accurate wafer stage, the off-diagonal entries of the dynamic decoupling matrix are given a fourth-order FIR filter structure as to counteract the coupled and dominant fourth-order plant behavior. The FIR filter coefficients are obtained using a gradient approximation-based algorithm which supports the means to obtain the optimized set of FIR coefficients through a limited set of perturbed-parameter experiments. In simulation, both performance as well as closed-loop stability are shown to be effectively dealt with.
Starting Page	5086
Ending Page	5091
File Size	1397545
Page Count	6
File Format	PDF
ISBN	9781424438716
ISSN	01912216
DOI	10.1109/CDC.2009.5399757
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-12-15
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Finite impulse response filter Motion control Control design MIMO Servomechanisms Feedback Control systems Algorithm design and analysis Circuit stability Integrated circuit manufacture
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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