NDLI: Multivariable predictive control of thin film deposition using a stochastic PDE model

Content Provider	IEEE Xplore Digital Library
Author	Dong Ni Christofides, P.D.
Copyright Year	2005
Description	Author affiliation: Dept. of Chem. Eng., California Univ., Los Angeles, CA, USA (Dong Ni; Christofides, P.D.)
Abstract	In this work, we construct a 2-dimensional (2D) stochastic partial differential equation (PDE) model for a thin film deposition process and design a multivariable predictive controller based on the constructed model to control thin film thickness and surface roughness. We focus on a thin film deposition process governed by three microscopic processes including molecule adsorption, migration and desorption. A 2D linear stochastic PDE model is initially constructed following the methodology proposed in our previous work [Ni, D. and Christofides, P. D., 2005]. Then, a stochastic PDE model-based multivariable controller is designed using the constructed stochastic PDE model. The control problem is formulated as a predictive control problem, in which the constructed stochastic PDE model is used to predict both the thin film thickness and the surface roughness. Moreover, the controller design is performed based on a finite stochastic ordinary differential equation (ODE) approximation of the stochastic PDE model to achieve high computational efficiency. The model-based predictive controller is applied to the kinetic Monte-Carlo (kMC) simulation of the deposition process to simultaneously control the thin film thickness and surface roughness. Closed-loop system simulation results demonstrate that the model is adequately accurate and that the controller is effective.
Sponsorship	American Automatic Control Council
Starting Page	3096
Ending Page	3101
File Size	423692
Page Count	6
File Format	PDF
ISBN	0780390989
ISSN	07431619
e-ISBN	0780390997
DOI	10.1109/ACC.2005.1470447
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-06-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Predictive control Sputtering Stochastic processes Predictive models Thickness control Rough surfaces Surface roughness Computational modeling Partial differential equations Process design
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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