NDLI: Cycle prediction EWMA run-to-run controller for mixed-product drifting process

Content Provider	IEEE Xplore Digital Library
Author	Ai, B. Zheng, Y. Zhang, H. Wang, Z. Zhang, Z.
Copyright Year	2009
Description	Author affiliation: Control Science and Engineering Department, Huazhong University of Science and Technology, Wuhan, 430074, China (Ai, B.; Zheng, Y.; Zhang, H.; Wang, Z.; Zhang, Z.)
Abstract	In semiconductor manufacturing processes, mixed-products are usually fabricated on the same set of process tool with different recipes. Run-to-Run controllers which based on the exponential weighted moving average (EWMA) statistic are probably the most frequently used in industry for the quality control of certain semiconductor manufacturing process steps. However, for mixed-product drifting process, if the break length of a product is large, then the process output at the beginning runs of cycle 1,2,… will be far deviated from target which will lead to a possible high rework rate and lots of waste wafers. Therefore, this study aims to develop a cycle prediction EWMA (CP-EWMA) approach to deal with the problem of large deviations in the first few runs of cycle 1,2,…. Simulation study showed that the proposed approaches are effective.
Starting Page	1908
Ending Page	1913
File Size	441431
Page Count	6
File Format	PDF
ISBN	9781424438716
ISSN	01912216
DOI	10.1109/CDC.2009.5400660
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-12-15
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Manufacturing processes Statistics Production Industrial control Manufacturing industries Quality control Optimal control Semiconductor device manufacture Error analysis Stability
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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