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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Haixin Zhu Jiping He Kim, B. |
| Copyright Year | 2004 |
| Description | Author affiliation: Dept. of Electr. Eng., Arizona Biodesign Inst., Tempe, AZ, USA (Haixin Zhu; Jiping He; Kim, B.) |
| Abstract | A unique structure for chronically implantable cortical electrodes based on benzocyclobutene (BCB) biopolymer was designed to perform intracortical and extracortical neural recording simultaneously in basic neuroscience research using animal models. It was fabricated on silicon wafer using standard planar CMOS surface microfabrication technique. Dry-etchable BCB was used to insulate the electrode and provide flexibility for micro-motion compliance between brain tissue and skull. This electrode is also designed to ease the handling and implantation during the surgery and to integrate buffer circuits to improve the signal-to-noise ratio. The reliable fabrication process was developed to improve the electrode yield and performance. A 15 /spl mu/m thick tungsten layer was sandwiched in the electrode tip to improve the stiffness for easy insertion during the surgery. The fabricated electrodes have two intra-cortical recording sites (20/spl times/20 /spl mu/m) in the tip penetrating into the cortex and two epidural recording sites (80/spl times/80um) on each side wing, providing a 6 channel system. One via (40/spl times/40 /spl mu/m) was also incorporated in the tip to balance the tip and provide the bio-seeding to improve the implants and neural tissue interaction. The acute surgical testing suggests that this electrode structure can penetrate the pia into the cortical tissue without damaging the electrode. |
| Starting Page | 4341 |
| Ending Page | 4344 |
| File Size | 767160 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780384393 |
| DOI | 10.1109/IEMBS.2004.1404208 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2004-09-01 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Implants Rats Electrodes Surgery Animal structures Neuroscience Semiconductor device modeling Silicon CMOS technology Insulation Integrated circuit : Biopolymer Cortical recording Neural Implant Flexible electrodes |
| Content Type | Text |
| Resource Type | Article |
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