NDLI: Modeling aspects and gain scheduled H∞controller design for an electrostatic micro-actuator with squeezed gas film damping effects

Content Provider	IEEE Xplore Digital Library
Author	Vagia, M. Tzes, A.
Copyright Year	2009
Description	Author affiliation: Electrical and Computer Engineering Department, University of Patras, Rio, Achaia-26500, Greece (Vagia, M.; Tzes, A.)
Abstract	In this article the modeling and control design aspects of an electrostatic microactuator (EmA) with squeezed thin film damping effects are presented. The modeling analysis of the squeezed film damping effect is investigated in the case of an EmA composed by a set of two plates. The bottom plate is clamped to the ground, while the moving plate is driven by an electrically induced force which is opposed by the force exerted by a spring element. The nonlinear model of the EmA is linearized at various operating points, and the feedforward compensator provides the nominal voltage. Subsequently a gain scheduled H∞ controller is used to tune the controller-parameters depending on the EmA's operating conditions. The controller is designed at various operating points based on the distance between its plates. The parameters of the controller are tuned in an optimal manner and computed via the use of the Linear Matrix Inequalities. Special attention is paid in order to examine the stability issue in the intervals between the operating points. Simulation results investigate the efficacy of the suggested modeling and control techniques.
Starting Page	4805
Ending Page	4810
File Size	1008308
Page Count	6
File Format	PDF
ISBN	9781424445233
ISSN	07431619
DOI	10.1109/ACC.2009.5160386
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Damping Control design Electrostatics Microactuators Transistors Springs Voltage Processor scheduling Optimal control Linear matrix inequalities
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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