NDLI: Design fabrication of high-precision stage and ultrahigh-speed nanoscale positioning

Content Provider	IEEE Xplore Digital Library
Author	Sakata, K. Fujimoto, H. Hara, A. Saiki, K.
Copyright Year	2009
Description	Author affiliation: Department of Electrical and Computer Engineering, Yokohama National University, 240-8501, Japan (Sakata, K.; Fujimoto, H.) \|\| Nikon Corporation, Yokohama, 244-8533, Japan (Hara, A.; Saiki, K.)
Abstract	Motion control techniques are employed on nanoscale positioning in precision mechanical equipment, for example, NC machine tools, exposure systems, and so on. The advanced motion control techniques are based on the precise current control. However, speed-up of the precise current response has a serious limitation because of the carrier period of an inverter. In addition, the positional response has to be slower than the current response. In this paper, an experimental precision stage was designed and fabricated. Then, a novel ultrahigh-speed nanoscale positioning was achieved based on multirate PWM control. The positional error is in 100 nm. The positioning time is 2 ms which is only 20 times as long as the carrier period.
Starting Page	2254
Ending Page	2259
File Size	925776
Page Count	6
File Format	PDF
ISBN	9781424445233
ISSN	07431619
DOI	10.1109/ACC.2009.5160031
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Fabrication Pulse width modulation Motion control Pulse width modulation inverters Current control Micromotors Control systems Computer numerical control Servomotors Digital signal processing
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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