NDLI: Improvement of accuracy and speed of a commercial AFM using positive position feedback control

Content Provider	IEEE Xplore Digital Library
Author	Mahmood, I.A. Moheimani, S.O.R.
Copyright Year	2009
Description	Author affiliation: School of Electrical Engineering and Computer Science, The University of Newcastle, Callaghan, NSW 2308, Australia (Mahmood, I.A.; Moheimani, S.O.R.)
Abstract	The Atomic Force Microscope (AFM) is a device capable of generating topographic images of sample surfaces with extremely high resolutions down to the atomic level. It is also being used in applications that involve manipulation of matter at a nanoscale. Early AFMs were operated in open loop. As a result, they were susceptible to piezoelectric creep, thermal drift, hysteresis nonlinearity and scan-induced vibration. These effects tend to distort the generated image. The distortions are often minimized by limiting the scanning speed and range of the AFMs. Recently a new generation of AFMs has emerged that utilizes position sensors to measure displacements of the scanner in three dimensions. These AFMs are equipped with feedback loops that work to minimize the adverse effects of hysteresis, piezoelectric creep and thermal drift on the obtained image using standard PI controllers. These feedback controllers are often not designed to deal with the highly resonant nature of an AFM's scanner, nor with the cross-coupling between various axes. In this paper we illustrate the drastic improvement in accuracy and imaging speed that can be obtained by proper design of a feedback controller. Such controllers can be incorporated into most modern AFMs with minimal effort since they can be implemented in software with the existing hardware.
Starting Page	973
Ending Page	978
File Size	1375107
Page Count	6
File Format	PDF
ISBN	9781424445233
ISSN	07431619
DOI	10.1109/ACC.2009.5160335
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Feedback control Atomic force microscopy Image generation Creep Hysteresis Adaptive control Force control Surface topography Image resolution Distortion measurement
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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