NDLI: Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM

Content Provider	IEEE Xplore Digital Library
Author	Merry, R. Uyanik, M. van de Molengraft, R. Steinbuch, M. Koops, R. van Veghel, M.
Copyright Year	2009
Description	Author affiliation: NMi van Swinden Laboratorium, Department of Length, Thijsseweg 11, 2629 JA Delft, The Netherlands (Koops, R.; van Veghel, M.) \|\| Eindhoven University of Technology, Department of Mechanical Engineering, Control Systems Technology group, PO Box 513, 5600 MB, The Netherlands (Merry, R.; Uyanik, M.; van de Molengraft, R.; Steinbuch, M.)
Abstract	The manipulation of samples in atomic force microscopes (AFMs) is often performed using piezoelectric actuators. In this paper, a metrological AFM with a 3 degree-of-freedom (DOF) stage driven by piezo-stack actuators is considered. The piezo actuators exhibit hysteresis, which can change the system dynamics and/or acts as a non-linear disturbance on the system. This deteriorates the performance of the AFM. The 3 DOF stage exhibits asymmetric hysteresis, which is modeled by extending the Coleman-Hodgdon model. The asymmetry includes a scan range dependent offset and an asymmetry between the trace and retrace directions. Non-linear multi-variable optimization is employed to derive the optimal generic model for all scan ranges. The proposed extended Coleman-Hodgdon model describes the asymmetric hysteresis over all scan ranges with an accuracy of 97%. Based on the model, a feedforward compensation method is developed. Experiments on the metrological AFM show that the application of the hysteresis feedforward largely improves the scanning accuracy.
Starting Page	967
Ending Page	972
File Size	853295
Page Count	6
File Format	PDF
ISBN	9781424445233
ISSN	07431619
DOI	10.1109/ACC.2009.5160007
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Hysteresis Atomic force microscopy Piezoelectric actuators Probes Creep Force control Atomic measurements Mechanical engineering Control system synthesis Nonlinear dynamical systems
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators

A Modified Prandtl-Ishlinskii Hysteresis Model for Modeling and Compensating Asymmetric Hysteresis of Piezo-Actuated Flexure-Based Systems.

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Modeling of Piezo-Actuated Positioning Systems

A dynamic nonlinearity model for a piezo-actuated positioning system

Hysteresis compensation of piezoelectric actuators under dynamic load condition

Disturbance-Observer-Based Hysteresis Compensation for Piezoelectric Actuators

Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators

Complete Open Loop Control of Hysteretic, Creeped, and Oscillating Piezoelectric Cantilevers

Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM

Similar Documents

Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators

A Modified Prandtl-Ishlinskii Hysteresis Model for Modeling and Compensating Asymmetric Hysteresis of Piezo-Actuated Flexure-Based Systems.

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Modeling of Piezo-Actuated Positioning Systems

A dynamic nonlinearity model for a piezo-actuated positioning system

Hysteresis compensation of piezoelectric actuators under dynamic load condition

Disturbance-Observer-Based Hysteresis Compensation for Piezoelectric Actuators

Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators

Complete Open Loop Control of Hysteretic, Creeped, and Oscillating Piezoelectric Cantilevers

Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM