NDLI: A new robust damping and tracking controller for SPM positioning stages

Content Provider	IEEE Xplore Digital Library
Author	Fleming, A.J. Aphale, S.S. Moheimani, S.O.R.
Copyright Year	2009
Description	Author affiliation: School of Electrical Engineering and Computer Science at the University of Newcastle, allaghan, NSW, Australia (Fleming, A.J.; Moheimani, S.O.R.) \|\| Center for Applied Dynamics Research (CADR), School of Engineering, Kings College, University of Aberdeen, UK (Aphale, S.S.)
Abstract	This paper demonstrates a simple second-order controller that eliminates scan-induced oscillation and provides integral tracking action. The controller can be retrofitted to any scanning probe microscope with position sensors by implementing a simple digital controller or op-amp circuit. The controller is demonstrated to improve the tracking bandwidth of an NT-MDT scanning probe microscope from 15 Hz (with an integral controller) to 490 Hz while simultaneously improving gain-margin from 2 dB to 7 dB. The penalty on sensor induced positioning noise is minimal. For the Scanning Probe Microscope considered in this paper, the noise is marginally increased from 0.30 nm RMS to 0.39 nm RMS. Open- and closed-loop experimental images of a calibration standard are reported at speeds of 1 and 10 lines per second (with a scanner resonance frequency of 290 Hz). Compared to traditional integral or PID controllers, the proposed controller provides a bandwidth improvement of approximately ten times. This allows faster imaging and less tracking lag at low speeds.
Starting Page	289
Ending Page	294
File Size	1724662
Page Count	6
File Format	PDF
ISBN	9781424445233
ISSN	07431619
DOI	10.1109/ACC.2009.5159934
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Robust control Damping Scanning probe microscopy Bandwidth Digital control Operational amplifiers Circuit noise Calibration Resonance Resonant frequency
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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