NDLI: Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope

Content Provider	IEEE Xplore Digital Library
Author	Yefremenko, V. Ade, P. Aird, K. Austermann, J. Beall, J. Becker, D. Benson, B. Bleem, L. Britton, J. Chang, C.L. Carlstrom, J. Cho, H. de Haan, T. Crawford, T. Crites, A. Datesman, A. Dobbs, M. Everett, W. Ewall-Wice, A. George, E. Halverson, N. Harrington, N. Henning, J. Hilton, G. Holzapfel, W. Hoover, S. Hubmayr, J. Irwin, K. Keisler, R. Kennedy, J. Lee, A. Leitch, E. Li, D. Lueker, M. Marrone, D.P. McMahon, J. Mehl, J. Meyer, S. Montgomery, J. Montroy, T. Natoli, T. Nibarger, J. Niemack, M. Novosad, V. Padin, S. Pryke, C. Reichardt, C. Ruhl, J. Saliwanchik, B. Sayre, J. Schafer, K. Shirokoff, E. Story, K. Vanderlinde, K. Vieira, J. Wang, G. Williamson, R. Yoon, K.W. Young, E.
Copyright Year	2002
Abstract	We present information about the design and fabrication of 90 GHz Transition Edge Sensor (TES) detectors deployed in the SPTpol camera for investigation of the cosmic microwave background (CMB) polarization signal. The 90 GHz portion of the camera consists of 180 individual feedhorn modules with dual polarization-sensitive detectors. We discuss microfabrication details and the characterization of detector elements. Each detector incorporates a dipole-like Pd-Au absorber and Mo/Au TES thermometer, suspended together on a rectangular silicon nitride (SiN) membrane via 6 long (640 μm) and narrow (10 μm) legs. The geometry of the SiN legs was optimized to provide the target thermal conductance of 200 pW/K in combination with mechanical robustness and reliability. The proximity effect in superconductor (Mo) and normal metal (Au) bilayers was utilized to obtain a TES operating temperature between 520 and 540 mK. Excellent superconducting properties (transition width <; 1 mK) and T_c uniformity (<; 3 mK) across 2 ^'' wafers were achieved by sputtering in a confocal system under a single vacuum using an independent RF bias applied to the substrate. Superconducting Nb dots patterned on the TES surface provided controllable broadening of the transition width. We report the results of transition measurements, along with characterization of film morphology.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	2100605
Ending Page	2100605
Page Count	1
File Size	631986
File Format	PDF
ISSN	10518223
Volume Number	23
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Detectors Fabrication Gold Films Superconducting transition temperature Silicon Educational institutions transition edge sensor CMB polarimetry low temperature detectors PACS: 07.57.Kp superconducting bolometer
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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