NDLI: Characterization of Nanometer Step Structure Formation During the Fabrication of Large-Scale Superconducting-Tunnel-Junction Array Detectors

Content Provider	IEEE Xplore Digital Library
Author	Ukibe, M. Kurokawa, A. Ohkubo, M.
Copyright Year	2002
Abstract	Superconducting-tunnel-junction (STJ) array detectors with an effective sensitive area of 4 mm² were fabricated for mass spectrometry. An array detector has one hundred Nb/Al/AlO_x/Al/Nb junctions with a 200 mum-square sensitive area. The junctions are quasi-horizontally arranged on a 10 mm-square chip. In the course of fabrication processes, we have found that an anomalous nanometer-step structure appears within the junctions located in the outer region of the array detectors at a specific stage of the fabrication processes. The anomalous steps cause an increase of the leakage current from ~5 nA to a few 100 nA. In order to characterize and prevent the step structure formation, we performed structural analyses with atomic force microscopy, interference microscopy, differential interference contrast microscopy, and transmission electron microscopy. Vertical fault and blister formations were identified in the junctions around the periphery of the array arrangement even on a low stress sputtering condition of 40 MPa. In addition, it is reasonable that a horizontal slip in the AlO_x barrier layer is induced by a nanoscale plastic deformation, which causes the large increase of the leakage current.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	140
Ending Page	143
Page Count	4
File Size	1133070
File Format	PDF
ISSN	10518223
Volume Number	19
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanostructures Fabrication Large-scale systems Sensor arrays Atomic force microscopy Detectors Transmission electron microscopy Josephson junctions Niobium Leakage current stress control Etching Josephson device mass spectroscopy nanofabrication sputtering
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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