NDLI: Fabrication of <emphasis emphasistype=italic>In-Situ</emphasis> <formula formulatype=inline><tex Notation=TeX>${rm MgB}_{2}$</tex></formula> Films Using Evaporation and Sputtering Simultaneous Deposition Technique

Content Provider	IEEE Xplore Digital Library
Author	Ho-Sup Kim Kyu-Jeong Song Rock-Kil Ko Sang-Soo Oh Dong-Woo Ha Tae-Hyung Kim Hong-Soo Ha Chan Park
Copyright Year	2002
Abstract	The evaporation and sputtering simultaneous deposition (ESSD) system was developed for in-situ deposition of MgB₂ thin films. Mg was evaporated from the nozzle of cylinder crucible which is heated by high frequency induction heating, while B was sputtered by RF-magnetron sputtering. The nozzle-substrate distance was small enough to keep high vapor pressure of Mg on the substrate. The Mg-flux coming out of the nozzle was controlled by means of regulating the temperature of Mg source, was monitored and was calculated in detail with the variation of the distance from its nozzle. The optimal deposition condition with the variations of substrate temperature, the temperature of Mg source and the power of RF-magnetron sputtering, was investigated. MgB₂ films with onset T_c of 14 K was obtained. The T_c of the film is lower than the bulk value of 39 K. Further works are in progress to improve the quality of MgB₂ films by further optimization of deposition parameters and improvement of the ESSD system.
Sponsorship	Council on Superconductivity Appl. Superconductivity Conference Inc MIT
Starting Page	2815
Ending Page	2818
Page Count	4
File Size	140745
File Format	PDF
ISSN	10518223
Volume Number	19
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Sputtering Superconducting thin films Substrates Superconducting films Molecular beam epitaxial growth Frequency Temperature control Superconductivity Magnesium sputtering Evaporation in-situ ${\rm MgB}_{2}$
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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