NDLI: Measurement of Dynamic Properties of MEMS and the Possibilities of Parameter Identification by Simulation

Content Provider	IEEE Xplore Digital Library
Author	Ebert, M. Naumann, F. Gerbach, R. Bagdahn, J.
Copyright Year	2007
Description	Author affiliation: Fraunhofer Inst. for Mech. of Mater., Halle (Ebert, M.; Naumann, F.; Gerbach, R.; Bagdahn, J.)
Abstract	In the paper basic investigations for the nondestructive quality testing methods for MEMS (micro-electro- mechanical systems) are presented that can be applied on wafer level in early stage of the manufacturing process. The dynamic measurements of test specimen are performed by laser-Doppler-vibrometry (LDV). Finite element (FE) models with different specifications are created to identify parameters from the measured eigenfrequency values. Different aspects of the numerical results and of experimental investigations of dynamic properties are presented for pressure sensor test structures. Results of identification of one and more parameters are shown.
Starting Page	1
Ending Page	6
File Size	6117067
Page Count	6
File Format	PDF
ISBN	142441105X
DOI	10.1109/ESIME.2007.360061
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-04-16
Publisher Place	UK
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Parameter estimation Nondestructive testing System testing Mechanical systems Manufacturing processes Performance evaluation Laser modes Finite element methods Semiconductor device modeling
Content Type	Text
Resource Type	Article

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