NDLI: Simulation of Wafer Probing Process Considering Probe Needle Dynamics

Content Provider	IEEE Xplore Digital Library
Author	Schmadlak, I. Hauck, T.
Copyright Year	2007
Description	Author affiliation: Freescale Halbleiter Deutschland GmbH, Munich (Schmadlak, I.; Hauck, T.)
Abstract	One key failure root cause during wafer production is the electrical test by probing all interconnects of each die of the wafer. The probing process can result in excessive damage of the back end of line (BEOL) wafer layers underneath the probe pad, especially if brittle low-k dielectrics are used. The industry is trying to reduce design limitations for these under pad areas. A 3D sub-modeling simulation approach has been used to investigate stress states in layers below the probe pad. The dynamic behavior of the needle is determined by modal analysis. Its representation and calculation is done by an analytical model using the modal superposition method. These small, specialized simulation models help to distribute the simulation effort, by handling specific aspects of the real process, such as the contact problem, needle dynamics and homogenization of fine structures. The results showed that the needle dynamics can be neglected during further studies. The static load due to the maximum displacement of the needle tip during the probe event is one magnitude higher then any dynamic driven load.
Starting Page	1
Ending Page	5
File Size	4673352
Page Count	5
File Format	PDF
ISBN	142441105X
DOI	10.1109/ESIME.2007.359944
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-04-16
Publisher Place	UK
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Probes Needles Testing Bonding Wire Contacts Production Dielectrics Electrical products industry Stress
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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