NDLI: Thin Film Interface Fracture Properties at Scales Relevant to Microelectronics

Content Provider	IEEE Xplore Digital Library
Author	Xiao, A. Wang, L.G. van Driel, W.D. van der Sluis, O. Yang, D.G. Ernst, L.J. Zhang, G.Q.
Copyright Year	2007
Description	Author affiliation: Delft Univ. of Technol., Delft (Xiao, A.; Wang, L.G.; van Driel, W.D.; van der Sluis, O.)
Abstract	Nowadays, one of the trends in microelectronic packaging is to integrate multi-functional systems into one package, resulting in more applications of highly dissimilar materials in the form of laminated thin films or composite structures. As a consequence, the number of interfaces increases. Often, the interface between these dissimilar materials is where the failure is most likely to occur especially when the packaged devices are subjected to the thermo-mechanical loading. Prediction of interface delamination is typically done using the critical energy release rate. However, the critical value is dependent on mode mixity. This paper describes our efforts on interface characterization as a function of mode mixity. A new test setup is designed for mixed mode bending testing. It allows for measuring the stable crack growth as the function of mode mixity. The crack length, necessary for calculation of the energy release rate is measured by means of an optical microscope. Finite element simulation is used to interpret the experimental results and thus to establish the critical energy release rates and mode mixities.
Starting Page	1
Ending Page	6
File Size	5672780
Page Count	6
File Format	PDF
ISBN	142441105X
DOI	10.1109/ESIME.2007.360011
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-04-16
Publisher Place	UK
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transistors Microelectronics Packaging Testing Optical microscopy Composite materials Thermomechanical processes Delamination Energy measurement Length measurement
Content Type	Text
Resource Type	Article

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